Epitaxial III-V on Silicon Seed Layer for Optical Integration

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Solution Overview

Problem

Current semiconductor devices for optical applications, particularly those using silicon photonics, face challenges with lattice mismatch and alignment precision issues when integrating III-V based light sources, leading to high threshold currents and low optical output power due to indirect band-gap silicon and inefficient light overlap with III-V materials.

Innovation Solution

A semiconductor device with an optically passive aspect and an optically active material grown epitaxially in a predefined structure within the passive aspect, enhancing light overlap and transmission, and utilizing a crystalline seed layer for improved modal gain and reduced threshold currents, without the need for bonding and alignment processes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If III-V based light sources are integrated with silicon photonics, then optical functionality is improved, but alignment precision and manufacturing complexity deteriorate due to lattice mismatch

Engineering Contradiction:
Improveoptical functionalityVSAvoidalignment precision
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by pre-forming the optically active material layer and its predefined structure (such as quantum wells or quantum dots) within the silicon substrate before completing the photonic structure fabrication. This allows the active material to be precisely positioned in advance, eliminating the need for subsequent bonding and alignment operations that would otherwise be required to integrate separate III-V light sources with silicon waveguides.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements the nested doll principle by embedding the optically active material layer and its functional structures (quantum wells, quantum dots, or defect structures) directly within the silicon substrate's crystal lattice. This nesting approach integrates the III-V based active material inside the silicon platform, allowing the active region to be contained within and coupled to the surrounding silicon photonic structures without requiring external bonding interfaces.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Ease of manufacture

If light is located mainly in silicon, then waveguide coupling is improved, but material gain decreases due to indirect band-gap

Engineering Contradiction:
Improvewaveguide couplingVSAvoidmaterial gain
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent applies local quality by creating a spatially differentiated structure where the silicon substrate provides the waveguide function with its excellent optical confinement properties, while the locally embedded optically active material layer (with direct band-gap III-V compounds) provides the light generation function. This local functional differentiation allows each material to operate in its optimal regime: silicon for low-loss waveguiding and III-V materials for efficient light emission.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent implements composite materials by combining silicon with III-V compound semiconductor materials (such as GaAs, InP, or InGaAs) within a single integrated structure. The composite structure leverages the complementary properties of both material systems: silicon's low optical loss and mature CMOS compatibility, and III-V materials' direct band-gap and high optical gain, achieving both efficient waveguide coupling and strong material gain.

Inventive Principle:
Principle #40Composite materials

3Loss of energy

If light is located mainly in III-V material system, then material gain is improved, but optical output power decreases due to lossy resonators

Engineering Contradiction:
Improvematerial gainVSAvoidoptical output power
Core Design Contradiction:
Loss of energyVSPower

Solution Approach 1:

The patent applies the intermediary principle by using the silicon waveguide structure as a mediator that couples the optically active material layer to the optical field. The silicon waveguide acts as an intermediate optical channel that collects the generated light from the III-V active material and efficiently guides it to the output, overcoming the lossy resonator problem by providing a low-loss transmission path that bridges the active material and the external optical circuit.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in lower threshold currents and higher optical output power, improving device performance by optimizing light overlap and transmission within the semiconductor device.

Implementation Method 1

at least an optically active material (3) comprising at least a material that is operable in substantially an optically active mode and that is grown in a predefined structure (5) provided in said optically passive aspect (2)

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentUS9513436B2Semiconductor device
Publication Date: 2016.12.06 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US9513436B2 patent drawing
  • US9513436B2 patent drawing
  • US9513436B2 patent drawing

AI summary

The present invention relates to a semiconductor device (1) for use in at least an optical application comprising: at least an optically passive aspect (2) that is operable in substantially an optically passive mode, and at least an optically active material (3) comprising at least a material that is operable in substantially an optically active mode, wherein: the optically passive aspect (2) further comprises at least a crystalline seed layer (4), the optically active material (3) being epitaxially grown in at least a predefined structure (5) provided in the optically passive aspect (2) that extends to at least an upper surface (4′) of the crystalline seed layer (4), and the optically passive aspect (2) is structured to comprise at least a passive photonic structure (6), wherein the crystalline seed layer (4) comprises a crystalline wafer and wherein the optically active material (3) comprises at least one of: a III-V material and a II-VI material.