Equipment Information Processing Standardization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The semiconductor fabrication process faces challenges in processing and standardizing equipment information due to different formats generated by various equipment manufacturers, leading to issues with reliability and compatibility, as existing communication protocols like SECS do not adequately address information not defined within their scope.
Innovation Solution
A method and system for processing equipment information by standardizing it into a desired format, generating practical and associated information, aggregating based on predicted data volume, and performing a reverse schedule operation using an information classification table to reconfigure analysis information into a unit schedule, ensuring compatibility and reliability across different equipment systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If equipment information is collected from multiple manufacturers' equipment with different formats, then the quantity of equipment information is increased, but the compatibility and reliability deteriorate due to format differences
Solution Approach 1:
The patent introduces an information processing system that acts as an intermediary between equipment from different manufacturers and the analysis system. This intermediary standardizes equipment information from various formats into a unified format, enabling compatibility without losing the quantity of information from multiple sources
Solution Approach 2:
The system changes the format parameter of equipment information by converting different manufacturer-specific formats into a standardized format. This parameter transformation maintains the quantity of information while ensuring compatibility across different equipment sources
2Reliability
If equipment information is standardized into a fixed format, then the compatibility is improved, but the information classification complexity increases
Solution Approach 1:
The patent segments equipment information into distinct categories (practical information and associated information) with specific classification rules. This segmentation simplifies the standardization process by providing a structured framework for organizing information from multiple sources into a compatible format
3Loss of information
If all equipment information is collected and processed, then the analysis completeness is improved, but the processing time and resource consumption increase
Solution Approach 1:
The patent applies partial action by selectively processing equipment information based on prediction. The system predicts the amount of information to be produced and processes information accordingly, avoiding unnecessary processing of all possible information while maintaining analysis completeness for critical data
Data Source
AI summary
Systems and methods of processing equipment information obtained from a plurality of equipment includes obtaining equipment information from the plurality of equipment; standardizing the equipment information such that the equipment information conforms to a desired format, the standardizing including generating practical information and associated information based on the standardized equipment information, the practical information indicating an operation state of each of the plurality of equipment, and the associated information being information about the practical information; aggregating the standardized equipment information the aggregating being based on a prediction of an amount of equipment information to be produced during a desired period of time; objectifying the aggregated equipment information to generate analysis information; and performing a reverse schedule operation to reconfigure the analysis information into a unit schedule based on an information classification table.