Manufacturing Equipment Modeling Platform for Physical-Virtual Chamber Data
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Solution Overview
Problem
Existing systems face challenges in efficiently accessing and integrating various models associated with manufacturing equipment, leading to inconvenience and difficulty in understanding and displaying performance data across different process chambers, tools, and facilities, which affects the quality and efficiency of manufacturing processes.
Innovation Solution
A comprehensive modeling platform that integrates multiple models for manufacturing equipment, providing a unified interface to access and display data from both physical and virtual process chambers, enabling seamless monitoring and predictive analysis of chamber performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If multiple models are integrated into a comprehensive platform, then the ease of operation and data accessibility is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple separate models (physics-based models, data-based models, hybrid models) into a single comprehensive modeling platform that provides unified access to all models through a common interface, eliminating the need for users to navigate multiple separate systems
Solution Approach 2:
The platform is designed as a universal system that can access and execute various types of models (digital twin models, machine learning models, physics-based models) through a single interface, allowing one system to perform multiple functions that previously required separate systems
2Manufacturing precision
If comprehensive modeling platform is implemented, then the manufacturing precision and process control is improved, but the device complexity and initial setup difficulty increases
Solution Approach 1:
The comprehensive modeling platform acts as an intermediary layer between users and the complex underlying models, providing simplified interfaces and automated model selection so that users do not need to directly manage the complexity of multiple model types and their parameters
Solution Approach 2:
The platform incorporates feedback mechanisms where model performance is continuously monitored and used to automatically select or adjust models, reducing the manual intervention needed and simplifying the user experience while maintaining high manufacturing precision
3Loss of information
If multiple data modes are provided for process chambers, then the information completeness is improved, but the ease of operation and user convenience deteriorates
Solution Approach 1:
The system dynamically adapts the data presentation based on user needs and context, automatically selecting appropriate data modes (real-time monitoring mode, historical analysis mode, predictive mode) without requiring users to manually configure complex data access parameters
Data Source
AI summary
A method includes receiving, via a graphical user interface (GUI), by a processing device, a first user input to view data associated with a first process chamber in a first chamber data mode. Data of the first chamber data mode includes data of a process operation performed in the first process chamber. The method further includes providing, for display on the GUI, first display data of the first data chamber mode responsive to receiving the first user input. The method further includes receiving a second user input to view data associated with the first process chamber in a second chamber data mode. Data of the second chamber data mode includes data of a virtual process operation performed by a virtual representation of the first process chamber. The method further includes providing, for display on the GUI, second display data of the second data chamber mode.