Semiconductor Equipment Modeling With Controller-Independent Verification

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Solution Overview

Problem

Current semiconductor equipment modeling methods require code reconstruction in the main program when the type of controller for displaying the equipment model object or model tree changes, leading to high adaptation costs.

Innovation Solution

A semiconductor equipment modeling method and device that uses a verification module independent of the main program to determine whether a model can be added as a sub-node in the equipment model tree, utilizing a generic-based function to identify controller types and a predetermined verification criterion library, allowing verification without modifying the main program's codes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If verification codes are integrated into the main program, then verification can be performed when specific controllers are used, but the main program must be reconstructed when controller types change, increasing development cost

Engineering Contradiction:
Improveverification accuracyVSAvoidadaptability to controller type changes
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The verification function is segmented from the main program and placed in an independent verification module. This module receives controller type information as parameters and performs verification based on the current controller types, allowing the main program to remain unchanged when controller types are modified.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The verification module is designed with universal functionality to handle multiple controller type combinations. By accepting controller type information as input parameters and using a predetermined verification criterion library, it can adapt to different controller types without requiring code reconstruction.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of operation

If verification codes are integrated into the main program, then verification logic is centralized, but any change in display requirements requires code reconstruction, increasing maintenance complexity

Engineering Contradiction:
Improveverification operationVSAvoidprogram structure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The verification codes are extracted from the main program and placed in an independent verification module. This extraction reduces the complexity of the main program while maintaining the verification function, as the verification module can be independently modified without affecting the main program structure.

Inventive Principle:
Principle #2Taking out (Extraction)

3Productivity

If verification is performed by the main program, then the verification process is simple, but it cannot adapt to different controller types without code changes, reducing operational flexibility

Engineering Contradiction:
Improvemodeling efficiencyVSAvoidcontroller type adaptability
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The verification module accepts controller type information as input parameters and adjusts its verification process based on these parameters. By using a predetermined verification criterion library and reflecting controller type information, the module can adapt to different controller types through parameter changes rather than code changes, maintaining high productivity.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS12632630B2Semiconductor equipment modeling method and device
Publication Date: 2026.05.19 BEIJING NAURA MICROELECTRONICS EQUIP CO LTD
  • US12632630B2 patent drawing
  • US12632630B2 patent drawing
  • US12632630B2 patent drawing

AI summary

Embodiments of the present disclosure provide a semiconductor equipment modeling method. The method includes, in response to an adding instruction operation, determining a type of a source controller configured to display an equipment model object and a type of a target controller configured to display an equipment model tree, using a verification module corresponding to the type of the source controller and the type of the target controller to obtain information of the selected to-be-added model and information of the selected target model, performing verification on the information of the to-be-added model and the information of the target model based on a predetermined equipment modeling type verification criterion library to determine whether the to-be-added model is able to be used as a sub-node of the target model, and displaying a verification result indicating whether the to-be-added model is able to be used as the sub-node of the target model.