ESC Multi-Zone Temperature Control Using AC and DC Heaters
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Solution Overview
Problem
Existing electrostatic chuck (ESC) temperature control systems face challenges in independently controlling multi-zones due to feedback control limitations, particularly with AC heater temperature sensors, which hinder precise temperature management during semiconductor substrate treatment processes.
Innovation Solution
The implementation of a multi-zone independent control system using a combination of alternating current (AC) and direct current (DC) heaters, along with a control module that utilizes an offset function and sensor multi-zone control, allows for independent temperature control of each region, enabling improved temperature distribution and process efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If AC heater temperature sensors are used for feedback control, then temperature measurement is achieved, but independent control of multi-zones is hindered
Solution Approach 1:
The electrostatic chuck is divided into multiple independent temperature zones, each equipped with its own temperature sensor and heater. This segmentation allows each zone to be controlled independently through separate control loops, resolving the contradiction between temperature measurement capability and independent multi-zone control by creating autonomous control units for each zone.
Solution Approach 2:
A control module acts as an intermediary between the temperature sensors and the heaters, processing temperature feedback signals and generating appropriate heating control signals. This intermediary component enables independent control of multiple zones by coordinating the feedback from AC heater temperature sensors with the heating requirements of each specific zone, overcoming the limitation of direct feedback control.
2Temperature
If multiple heating zones are implemented, then temperature distribution control is improved, but system complexity increases
Solution Approach 1:
The control module is designed with multi-functionality to handle temperature control across multiple zones using a unified control architecture. It can process feedback from different temperature sensors, manage multiple heaters, and implement temperature distribution control algorithms, thereby achieving improved temperature control without proportionally increasing system complexity through a universal control unit.
Solution Approach 2:
Multiple temperature control functions for different zones are merged into a single integrated control module. This consolidation combines the control logic, feedback processing, and heater management for all zones into one unified system, reducing overall system complexity while maintaining the capability for independent multi-zone temperature control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables precise temperature control across all regions, including those with AC heater sensors, enhancing etch rate and critical dimension distribution, thereby improving the overall semiconductor substrate treatment process.
Implementation Method 1
a plurality of first heaters; a plurality of second heaters providing power different from that of the first heaters
Data Source
AI summary
There are provided an electrostatic chuck (ESC) temperature control unit capable of independently controlling multi-zones of an electrostatic chuck using an alternating current (AC) heater and a direct current (DC) heater, and a substrate treating apparatus including the same. The substrate treating apparatus includes: a housing; a substrate support unit; a shower head unit; a plasma generating unit; and an ESC temperature control unit, wherein the ESC temperature control unit which controls a temperature of the electrostatic chuck includes: a plurality of first heaters; a plurality of second heaters providing power different from that of the first heaters; and a control module controlling the first heaters and the second heaters, and the control module independently controls the first heaters and the second heaters.