ESC Pedestal Voltage Isolation with Dielectric Tube Adapter
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current electrostatic chuck (ESC) pedestals in plasma-based processing systems rely solely on physical separation to isolate RF, AC, and DC signals from the ground plane, leading to arcing and detrimental effects due to reduced separation distances, especially with the addition of high-voltage electrodes and gas lines.
Innovation Solution
The implementation of insulative tubes with dielectric-coated interior surfaces and strategically designed gaps within the tube adapter portion of the ESC pedestal to effectively separate RF, AC, and DC signals from the ground plane, preventing arcing by maintaining adequate clearance and using materials with suitable dielectric strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If extra electrodes and gas lines are added to the ESC pedestal, then the functionality and versatility of the system is improved, but the physical separation distance between high-voltage components and the ground plane is reduced, causing arcing and reliability issues
Solution Approach 1:
The patent introduces an insulating barrier (intermediary material) between the high-voltage electrodes/gas lines and the ground plane. This intermediary component provides the necessary electrical isolation, allowing extra electrodes and gas lines to be added without causing arcing, thus resolving the contradiction between added functionality and reliability.
Solution Approach 2:
The patent adds a dimensional aspect to the pedestal structure by incorporating insulating barriers that create additional spatial separation in the vertical dimension. This allows components to be arranged in three-dimensional space while maintaining adequate clearance, enabling increased functionality without compromising arcing prevention.
2Ease of manufacture
If physical separation is used to isolate RF and AC signals from the ground plane, then the manufacturing simplicity is maintained, but the separation distance becomes insufficient when extra components are added, leading to arcing
Solution Approach 1:
The insulating barrier serves as a mediator that provides reliable electrical isolation without complicating the manufacturing process. The barrier can be integrated into the existing pedestal structure using standard manufacturing techniques, maintaining ease of manufacture while significantly improving arcing prevention capability.
3Reliability
If the pedestal structure is modified to include insulative tubes and dielectric coatings, then the voltage isolation and arcing prevention are improved, but the device complexity increases
Solution Approach 1:
The patent employs a nested structure where insulative tubes are positioned within the pedestal, and dielectric coatings are applied to internal surfaces. This nesting approach allows multiple isolation functions to be integrated within the existing pedestal volume, improving voltage isolation without proportionally increasing overall device complexity.
Solution Approach 2:
The patent uses composite material structures combining conductive pedestal materials with insulating coatings and tubes. This composite approach enables the pedestal to simultaneously provide structural support, electrical isolation, and thermal management functions, improving voltage isolation while managing the increase in device complexity through material integration.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively isolates high-voltage signals from the ground plane, preventing arcing and ensuring reliable operation by maintaining the required clearance specifications and using materials that can withstand the high temperatures and voltages encountered in the plasma-based processing system.
Implementation Method 1
insulative tubes with dielectric-coated interior surfaces to effectively separate RF, AC, and DC signals from the ground plane
Implementation Method 2
electrostatic chuck (ESC) designed to increase a pedestal voltage isolation
Data Source
AI summary
Various embodiments include an apparatus to retrofit into an electrostatic chuck (ESC) of an existing plasma-based processing system. The apparatus includes a tube adapter portion having a dielectric coating formed on an inner surface of the tube adapter portion to prevent arcing between high voltage electrodes within the tube adapter portion and a main body of the tube adapter portion during an operation of the plasma-based processing system, a number of insulative tubes with the high voltage electrodes to be enclosed therein, and an enlarged gap portion of the tube adapter portion proximate outboard ones of the plurality of insulative tubes to prevent arcing. Other methods of forming the ESC, and related devices, apparatuses, and systems are disclosed.