Conductive Contact Structures for ESD Protection in ICs

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Solution Overview

Problem

Conventional electrostatic discharge protection (ESDP) methods for integrated circuits (ICs) face challenges as IC devices shrink, with on-die diodes occupying valuable space, inducing capacitive loading, and being ineffective in silicon-on-insulator or thinned substrate devices, limiting high-frequency performance and increasing power consumption.

Innovation Solution

The implementation of conductive contact structures with a first contact element exposed and a second contact element spaced apart by a gap, providing electrical contact with an electrical pathway, which can controllably short or isolate signal pathways to ground, thus protecting ICs from electrostatic discharge without occupying on-die real estate and maintaining high-frequency performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If on-die diodes are used for electrostatic discharge protection, then IC devices are protected from ESD, but valuable on-die space is occupied

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidon-die space
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The ESD protection function is extracted from the on-die location and relocated to the package substrate level. The conductive contact structure with gap is implemented on the package substrate, separating the ESD protection mechanism from the IC die, thereby preserving valuable on-die real estate while maintaining protection functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The ESD protection is moved from the two-dimensional on-die plane to the three-dimensional package substrate level. The conductive contact structure with gap is positioned on the package substrate, utilizing the vertical dimension and package level space to provide ESD protection without consuming on-die area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If on-die diodes are used for electrostatic discharge protection, then IC devices are protected from ESD, but capacitive loading is induced

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidcapacitive loading
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The capacitive loading issue is addressed by extracting the ESD protection mechanism from the on-die location where it directly loads the signal pathways. The conductive contact structure with gap on the package substrate provides ESD protection with minimal capacitive coupling to the high-frequency signal pathways, reducing energy loss and capacitive loading effects.

Inventive Principle:
Principle #2Taking out (Extraction)

3Reliability

If conventional ESDP methods are used, then electrostatic discharge protection is provided, but high-frequency performance is limited

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidhigh-frequency performance
Core Design Contradiction:
ReliabilityVSSpeed

Solution Approach 1:

The conductive contact structure with gap provides localized ESD protection at the package substrate level without interfering with the high-frequency signal pathways on the IC die. The gap in the conductive contact structure allows high-frequency signals to pass through with minimal disturbance while still providing ESD protection at the package level.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

By moving ESD protection to the package substrate level, the protection mechanism operates in a different dimensional space from the high-frequency signal pathways on the IC die. This spatial separation allows both ESD protection and high-frequency performance to coexist without mutual interference.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

4Reliability

If on-die diodes are used for electrostatic discharge protection, then IC devices are protected from ESD, but power consumption increases

Engineering Contradiction:
Improveelectrostatic discharge protectionVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The power consumption issue is resolved by extracting the ESD protection mechanism from the on-die location to the package substrate level. The conductive contact structure with gap on the package substrate provides ESD protection with minimal parasitic effects, reducing leakage power and energy loss during normal device operation.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively protects ICs from electrostatic discharge without occupying valuable on-die space and maintains high-frequency performance, being adaptable to various structural levels and substrate types, including silicon-on-insulator devices.

Implementation Method 1

electronic components of the device may be at risk for damage due to electrostatic discharge. Electrostatic forces may accumulate during manufacturing, handling, and testing, and discharge of these forces may cause permanent damage to sensitive circuits.

Methodology Applied
Scientific EffectElectrostatic discharge: Electrostatic Discharge

Implementation Method 2

a conductive contact structure that includes: a first contact element, wherein the first contact element is exposed at a face of the IC component; and a second contact element, wherein the first contact element is between the face of the IC component and the second contact element

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11239155B2Conductive contact structures for electrostatic discharge protection in integrated circuits
Publication Date: 2022.02.01 INTEL CORP
  • US11239155B2 patent drawing
  • US11239155B2 patent drawing
  • US11239155B2 patent drawing

AI summary

Disclosed herein are structures, devices, and methods for electrostatic discharge protection (ESDP) in integrated circuits (ICs). In some embodiments, an IC component may include a conductive contact structure that includes a first contact element and a second contact element. The first contact element may be exposed at a face of the IC component, the first contact element may be between the face of the IC component and the second contact element, the second contact element may be spaced apart from the first contact element by a gap, and the second contact element may be in electrical contact with an electrical pathway in the IC component.