Two-Terminal ESD Protection IC With Tuned Snapback Structure

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Solution Overview

Problem

Current ESD protection solutions for IC devices, such as SCR and stand-alone grounded gate NMOS, are susceptible to gate oxide breakdown and false triggering during ESD events, leading to premature failure.

Innovation Solution

A two-terminal IC device with a non-planar architecture is introduced, featuring a deep N-well stacked between a P-type substrate and multiple wells, with optimized doping concentrations and dimensions to modulate snapback characteristics, eliminating the need for additional circuitry and preventing false triggers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional ESD protection solutions (SCR, grounded gate NMOS) are used, then ESD protection function is provided, but gate oxide breakdown and false triggering occur during ESD events

Engineering Contradiction:
ImproveESD protection reliabilityVSAvoidgate oxide breakdown and false triggering
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent modifies the electrical parameters of the FET by adjusting doping concentrations in the source and drain regions, as well as the threshold voltage, to optimize snapback characteristics. This enables the device to achieve higher breakdown voltages and prevent false triggering during ESD events while maintaining reliable protection functionality

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent transitions from conventional planar FET structures to non-planar architectures including FinFETs and nanosheet/nanoribbon FETs. This dimensional change provides all-around gate control and improved electric field distribution, preventing gate oxide breakdown while maintaining ESD protection capability

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Reliability

If planar FET architecture is used, then device simplicity is maintained, but ESD protection performance is insufficient due to gate oxide breakdown

Engineering Contradiction:
ImproveESD protection performanceVSAvoidFET architecture complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent adopts non-planar FET architectures (FinFETs with vertical fins, nanosheet/nanoribbon FETs with three-dimensional channels) that provide superior gate control and electric field management. These complex structures deliver enhanced ESD protection performance through improved snapback characteristics and higher breakdown voltages, justifying the increased structural complexity

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If additional circuitry is added for ESD protection, then protection capability is enhanced, but device complexity increases

Engineering Contradiction:
ImproveESD protection capabilityVSAvoidcircuitry complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent designs the FET with intrinsic snapback characteristics through optimized doping profiles and threshold voltage control, enabling the device to automatically activate ESD protection without requiring external trigger circuits or additional protection components. The FET itself provides the protection function through its modified physical and electrical properties

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent makes the FET serve dual functions: normal circuit operation and ESD protection. By optimizing the FET's snapback characteristics, the same device structure provides both switching functionality and inherent ESD protection capability, eliminating the need for separate protection circuits

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The two-terminal IC device effectively provides enhanced ESD protection by tuning snapback characteristics, preventing premature breakdown and false triggering, and ensuring reliable operation during ESD events.

Implementation Method 1

a layer including a first doped semiconductor material with a first doping type; a first region over the layer, the first region including a second doped material with a second doping type that is opposite from the first doping type

Methodology Applied
Scientific EffectDoping: Dopants

Implementation Method 2

Two-terminal integrated circuit device for electrostatic discharge protection

Methodology Applied
Scientific EffectElectrostatic Discharge: Electrostatic Discharge

Data Source

PatentUS20240413147A1Two-terminal integrated circuit device for electrostatic discharge protection
Publication Date: 2024.12.12 INTEL CORP
  • US20240413147A1 patent drawing
  • US20240413147A1 patent drawing
  • US20240413147A1 patent drawing

AI summary

A two-terminal IC device may be used for ESD protection. The IC device may include a deep N-well may be between a P-type substrate and a group of wells that includes a first P-well, a second P-well, and a N-well. There may be another well between the second P-well and the N-well. A P-type semiconductor structure may be formed in the P-well. Two N-type semiconductor structures may be formed in the second P-well and the N-well, respectively. A contact of the P-type semiconductor structure may be electrically coupled to a contact of the N-type semiconductor structure in the second P-well. The two contacts may constitute the first terminal of the IC device. The contact of the N-type semiconductor structure in the N-well may constitute the second terminal of the IC device. The first P-well may have a greater dimension but lower dopant concentration than the second P-well or the N-well.