ESD Protection Circuit for RF Switch MIM Capacitors

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Solution Overview

Problem

Existing ESD protection circuits for RF switches and MIM capacitors are inadequate in protecting against electrostatic discharge (ESD) surges without compromising RF transmission power characteristics, particularly in miniaturized modules where MIM capacitors are prone to breakdown due to limited inter-layer insulating film thickness.

Innovation Solution

An ESD protection circuit using a series connection of Schottky diodes connected in parallel to MIM capacitors, with an asymmetric number of diodes to minimize ON resistance and suppress leakage during DC bias, allowing ESD surges to pass through with minimal resistance without attenuating RF signal amplitude.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If an MIM capacitor is integrated into the RF switch for miniaturization, then the module size is reduced, but the inter-layer insulating film thickness cannot be increased, causing reduced withstand voltage and making the capacitor prone to breakdown under ESD surge

Engineering Contradiction:
Improvemodule sizeVSAvoidwithstand voltage
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent introduces an ESD protection circuit as an intermediary component between the MIM capacitor and the ESD surge. This circuit includes a first D-mode HEMT and a second D-mode HEMT that work together to divert ESD current away from the MIM capacitor, protecting it from breakdown while allowing the capacitor to maintain its integrated, miniaturized form

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The ESD protection function is segmented into two separate D-mode HEMTs rather than using a single device or a different device type. The first HEMT handles the primary ESD protection while the second HEMT provides additional protection and ensures proper current distribution, dividing the protection function to enhance reliability without increasing overall complexity

Inventive Principle:
Principle #1Segmentation

2Reliability

If an ESD protection circuit is added to protect the MIM capacitor, then ESD robustness is improved, but the circuit complexity increases and may affect RF transmission power characteristics

Engineering Contradiction:
ImproveESD robustnessVSAvoidcircuit complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent utilizes the inherent characteristics of D-mode HEMTs, which have negative resistance regions that can be exploited for ESD protection. By changing the operating parameters and biasing conditions of the D-mode HEMTs, the circuit achieves ESD protection functionality without requiring additional complex circuitry, maintaining simplicity while improving robustness

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The D-mode HEMTs serve multiple functions: they provide ESD protection during surge events while also maintaining proper RF signal transmission during normal operation. The same components that protect against ESD also function as part of the RF switch circuitry, eliminating the need for separate protection components and reducing overall circuit complexity

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If a D-mode HEMT based ESD protection circuit is used, then ESD protection is achieved, but current flows through the circuit during normal operation causing power loss and affecting RF characteristics

Engineering Contradiction:
ImproveESD protectionVSAvoidpower loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The ESD protection circuit using D-mode HEMTs is designed to be dynamic rather than static. During normal RF operation, the HEMTs remain in a high-impedance state with minimal current flow, preserving RF characteristics. When ESD surge occurs, the HEMTs dynamically switch to a low-impedance state to conduct the surge current, providing protection only when needed and minimizing power loss during normal operation

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively protects MIM capacitors from ESD while maintaining transmission power characteristics, achieving HBM resistance of 1 kV or more and power handling capability of 1 W or more, thus ensuring compatibility with RF characteristics in power amplifier modules.

Implementation Method 1

a plurality of first Schottky diodes connected in series to each other and having anodes connected on the first terminal side and cathodes connected on the second terminal side

Methodology Applied
Scientific EffectSchottky barrier diode effect: Diode

Implementation Method 2

ESD protection circuit connected in parallel to a MIM capacitor between a first terminal and a second terminal

Methodology Applied
Scientific EffectElectrostatic discharge: Electrostatic Discharge

Implementation Method 3

an ESD protection circuit connected in parallel to a MIM capacitor between a first terminal and a second terminal

Methodology Applied
Scientific EffectCapacitance: Capacitance

Data Source

PatentUS9685949B2ESD protection circuit and RF switch
Publication Date: 2017.06.20 MURATA MFG CO LTD
  • US9685949B2 patent drawing
  • US9685949B2 patent drawing
  • US9685949B2 patent drawing

AI summary

An ESD protection circuit is connected in parallel to a MIM capacitor between a first terminal and a second terminal. First Schottky diodes are connected in series to each other and have anodes connected on the first terminal side and cathodes connected on the second terminal side. Second Schottky diodes are connected in series to each other and connected in anti-parallel to the first Schottky diodes. When an RF signal is inputted to neither the first terminal nor the second terminal, the first terminal has a higher DC voltage than that of the second terminal. The number of the first Schottky diodes is greater than the number of the second Schottky diodes. The number of the second Schottky diodes is set such that an amplitude of the RF signal does not attenuate to predetermined amplitude of the RF signal when the RF signal passes through the MIM capacitor.