ESD Shield for Semiconductor Package ESD Resistance

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Solution Overview

Problem

The increasing miniaturization of semiconductor devices has made them more vulnerable to electrostatic discharge (ESD) events, leading to a rise in ESD-induced package failures, as traditional packaging designs are insufficient in providing adequate protection against such events.

Innovation Solution

The implementation of an electrostatic discharge (ESD) shield, typically formed from materials like AlSiC, which provides high resistivity and thermal conductivity, is mounted over the semiconductor die to increase the package's impedance and resistance to ESD, replacing traditional stiffeners and heat spreaders, and is affixed using adhesives like thermal setting epoxy, with thermal grease enhancing heat transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If traditional packaging designs are used, then manufacturing simplicity is maintained, but resistance to electrostatic discharge deteriorates

Engineering Contradiction:
Improveresistance to electrostatic dischargeVSAvoidpackage structure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The package structure is segmented into distinct functional layers: a substrate, an ESD shield layer formed thereover, and optional encapsulant layers. This segmentation allows the ESD shield to be implemented as a separate functional component rather than integrating ESD protection into existing structures, thereby improving ESD resistance without significantly complicating the overall manufacturing process.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The ESD shield is formed using composite material structures, specifically alternating layers of conductive material and dielectric material. This composite approach creates a distributed capacitive network that provides effective ESD protection while maintaining compatibility with standard semiconductor packaging materials and processes.

Inventive Principle:
Principle #40Composite materials

2Reliability

If package impedance is increased to resist ESD, then ESD protection is improved, but signal integrity may deteriorate

Engineering Contradiction:
ImproveESD protectionVSAvoidsignal integrity degradation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The ESD shield structure implements local quality by creating spatially varying impedance characteristics. The distributed capacitive network formed by alternating conductive and dielectric layers provides different impedance characteristics at different frequencies: high impedance at ESD frequencies to block discharge currents, while maintaining appropriate impedance matching at signal frequencies to preserve signal integrity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The shield structure dynamically changes its electrical parameters based on frequency. At low ESD frequencies, the distributed capacitance presents high impedance to block discharge currents. At higher signal frequencies, the capacitive reactance decreases, allowing signal frequencies to pass through with minimal attenuation, thus maintaining signal integrity while providing ESD protection.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The ESD shield effectively increases the package's resistance to ESD-induced failures, allowing it to withstand higher discharge currents and reduce capacitance, thereby minimizing damage from ESD events, while also serving as a heat spreader and potentially eliminating the need for shunt circuitry, thus enhancing die functionality and manufacturing efficiency.

Implementation Method 1

The ESD shield effectively increases the package's resistance to ESD-induced failures, allowing it to withstand higher discharge currents

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

typically formed from materials like AlSiC, which provides high resistivity and thermal conductivity

Methodology Applied
Scientific EffectThermal Conduction: Conduction (thermal)

Implementation Method 3

with thermal grease enhancing heat transfer

Methodology Applied
Scientific EffectThermal Conduction: Conduction (thermal)

Data Source

PatentUS8258016B2Semiconductor package having increased resistance to electrostatic discharge
Publication Date: 2012.09.04 BELL SEMICONDUCTOR LLC
  • US8258016B2 patent drawing
  • US8258016B2 patent drawing
  • US8258016B2 patent drawing

AI summary

Embodiments of the invention include a semiconductor integrated circuit package that includes a substrate having an integrated circuit die attached thereto. The package includes a ESD shield attached to the substrate. The ESD shield configured to increase the ESD hardness of the package. The ESD shield can further serve to stiffen the package to prevent warping and operate as a heat spreader.