ESD Transistor with U-Shaped Current Path for High Voltage Protection

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Solution Overview

Problem

Existing ESD protection circuits face difficulties in shunting high-level ESD currents while maintaining low clamping voltages, particularly in high-voltage applications, leading to increased turn-on voltage and snapback effects that can damage core circuits.

Innovation Solution

The ESD transistor design features a collector region, sink region, and buried layer forming a U-shaped current path, along with a charge pump circuit and diodes, to create an extended current path and reduce clamping voltage, allowing for efficient shunting of high-level ESD currents and rapid turn-on operation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If the doping concentration in the source and drain is reduced to maintain high breakdown voltage, then the breakdown voltage is improved, but the ability to shunt high-level ESD currents deteriorates

Engineering Contradiction:
Improvebreakdown voltageVSAvoidESD current shunting ability
Core Design Contradiction:
StrengthVSReliability

Solution Approach 1:

The source/drain structure is segmented into multiple regions with different doping concentrations. The collector region has low doping concentration for high breakdown voltage, while the sink region has high doping concentration for effective ESD current shunting. This segmentation allows each region to optimize its function independently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the transistor are assigned different local properties: the collector region maintains low doping concentration for high voltage operation, while the sink region introduces high doping concentration specifically for ESD protection. This local quality differentiation resolves the contradiction between breakdown voltage and ESD current handling.

Inventive Principle:
Principle #3Local quality

2Strength

If high voltage operation is implemented, then the voltage handling capability is improved, but the turn-on voltage increases and snapback effects occur

Engineering Contradiction:
Improvevoltage handling capabilityVSAvoidsnapback effect
Core Design Contradiction:
StrengthVSObject-generated harmful factors

Solution Approach 1:

The sink region acts as an intermediary between the collector and substrate, providing a controlled path for ESD current. This intermediary structure prevents direct high-current flow through the collector-base junction, thereby reducing snapback effects while maintaining high voltage handling capability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention introduces a vertical dimension with the sink region extending below the collector region. This three-dimensional structure creates an extended current path that reduces the lateral electric field strength, thereby mitigating snapback effects while preserving high voltage operation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If the current path is extended to reduce clamping voltage, then the ESD protection performance is improved, but the device area increases

Engineering Contradiction:
ImproveESD protection performanceVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The current path is extended in the vertical dimension by introducing the sink region below the collector region, rather than extending it laterally. This vertical extension achieves longer current path length for reduced clamping voltage without proportionally increasing the device footprint area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The sink region is nested within the device structure below the collector region, utilizing the vertical space efficiently. This nesting approach extends the current path length without requiring additional lateral area, thereby improving ESD protection performance within a compact footprint.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces clamping voltage, enhances the ability to handle high stress currents and voltages, and prevents thermal breakdown, enabling stable operation of high-voltage core circuits with improved ESD protection and reduced chip size.

Implementation Method 1

a sink region disposed vertically below the collector region; and a buried layer protruding horizontally further than the sink region under the sink region

Methodology Applied
Scientific EffectElectrical Conduction: Conduction (electrical)

Data Source

PatentUS9431389B2ESD transistor for high voltage and ESD protection circuit thereof
Publication Date: 2016.08.30 SK KEYFOUNDRY INC
  • US9431389B2 patent drawing
  • US9431389B2 patent drawing
  • US9431389B2 patent drawing

AI summary

An ESD transistor and an ESD protection circuit thereof are provided. An ESD transistor includes a collector region disposed on a surface of a substrate, a sink region disposed vertically below the collector region, and a buried layer protruding horizontally further than the sink region under the sink region.