Electrochemical Etch Drive System External Motor Mounting
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Solution Overview
Problem
Conventional electrochemical etch tools using scanning electrodes suffer from process non-uniformities and high maintenance needs due to contamination of mechanical components by process fluids, leading to reduced throughput and increased maintenance costs.
Innovation Solution
A drive system with a rotating electric motor and power transmission positioned outside the frame, connected to a movable electrode assembly, providing a wide range of scan speeds and torque while minimizing contamination risks, ensuring precise and uniform motion across the substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If mechanical components are positioned inside the frame near the electrolyte container, then the drive assembly can directly control the movable electrode assembly, but the mechanical components become contaminated by process fluids leading to increased maintenance needs
Solution Approach 1:
The drive assembly is extracted from the interior of the frame and repositioned to the exterior, specifically to the top side of the frame. This separation removes the mechanical components from the contaminated environment inside the frame while maintaining their functional connection to the movable electrode assembly through the power transmission mechanism that extends along the outer side-wall of the frame.
2Measurement precision
If linear motors are used to drive the movable electrode assembly, then precise motion control is achieved, but the motors become contaminated by process fluids requiring frequent maintenance
Solution Approach 1:
The linear motors are extracted from the interior environment and repositioned to the exterior top side of the frame. The power transmission mechanism conveys the driving force from these externally positioned motors to the movable electrode assembly, thereby maintaining precise motion control while protecting the motors from contamination by process fluids.
3Device complexity
If the drive assembly is positioned inside the frame, then compact design is achieved, but process fluid leakage contaminates the drive components reducing throughput
Solution Approach 1:
The drive assembly is repositioned from a planar interior location to a three-dimensional exterior location on the top side of the frame. The power transmission mechanism extends along the outer side-wall, utilizing the vertical dimension to route power while keeping the drive components clear of the electrolyte containment volume, thereby preventing contamination and maintaining throughput.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances process uniformity, reduces maintenance requirements, and increases throughput by maintaining high reliability and flexibility in adapting to various substrate types and scan speed profiles, thereby improving overall production yield and reducing costs.
Implementation Method 1
a drive assembly has a rotating electric motor and a power transmission connected thereto
Implementation Method 2
a power transmission extends along an outer side-wall of the frame
Data Source
AI summary
By providing an enhanced drive system for electrochemical etch process tools, the operational range, as well as the reliability, may be enhanced. For this purpose, a high torque electric motor may be used in combination with an appropriate power transmission, which may be attached to a corresponding tool frame at a height level that is above a corresponding height level at which respective chemicals are provided to the substrate under process. Hence, the probability for contamination by chemicals may be significantly reduced, thereby also reducing maintenance efforts resulting in reduced production costs.