Etched Beryllium Radiation Window Foil for X-ray Transmission

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Solution Overview

Problem

Current methods for manufacturing thin beryllium radiation window foils are limited to thicknesses of around 8 micrometers due to grain size issues, leading to gas leaks and absorption problems, and there is a need for materials with better mechanical strength and reduced toxicity.

Innovation Solution

A method using an etchable carrier with an etch stop layer and thin film deposition to create a beryllium or alternative material layer as a mesh structure, which is then attached to a support structure and etched to form a gastight, thin radiation window foil with enhanced mechanical properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If rolling technology is used to manufacture beryllium foils, then the foils can be produced with conventional thickness, but the grain size becomes larger than foil thickness causing gas leaks

Engineering Contradiction:

Improvefoil thickness controlVSAvoidgastightness

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The invention changes the manufacturing method from conventional rolling to a new process that produces ultra-fine grain structure. This parameter change in grain size enables foils thinner than 8 micrometers to maintain gastightness, resolving the contradiction between achieving thinner foils and preventing gas leaks through grain boundaries.

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The invention replaces the mechanical rolling process with an alternative manufacturing method that creates ultra-fine grains. This substitution eliminates the grain size limitation inherent in rolling technology, allowing production of foils where thickness is less than grain size while maintaining structural integrity and gastightness.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Loss of energy

If beryllium foil thickness is reduced to decrease X-ray absorption, then X-ray transmission improves, but the foil becomes insufficiently gastight

Engineering Contradiction:

ImproveX-ray absorptionVSAvoidgastightness

Core Design Contradiction:

Loss of energyVSReliability

Solution Approach 1:

The invention changes the grain size parameter to ultra-fine dimensions, which allows the foil thickness to be reduced below 8 micrometers while maintaining gastightness. This enables thinner foils that transmit X-rays more effectively without sacrificing the sealing function, resolving the contradiction between X-ray transmission and gastightness.

Inventive Principle:

Principle #35Parameter changes

3Loss of energy

If beryllium is used for radiation window foils, then X-ray absorption is minimized, but toxicity issues arise from beryllium-containing dust

Engineering Contradiction:

ImproveX-ray absorptionVSAvoidtoxicity

Core Design Contradiction:

Loss of energyVSObject-affected harmful factors

Solution Approach 1:

The invention uses composite or alternative material structures that maintain the low X-ray absorption property while eliminating or reducing toxic beryllium content. This resolves the contradiction between achieving low X-ray absorption and avoiding toxicity hazards from beryllium dust during manufacturing and handling.

Inventive Principle:

Principle #40Composite materials

4Loss of energy

If thin beryllium foils are produced to reduce absorption, then radiation transmission improves, but mechanical strength and handling become problematic

Engineering Contradiction:

Improveradiation absorptionVSAvoidmechanical strength

Core Design Contradiction:

Loss of energyVSStrength

Solution Approach 1:

The invention changes the grain size parameter to ultra-fine dimensions and controls the microstructure to enhance mechanical properties. This enables production of ultra-thin foils with improved strength-to-thickness ratio, resolving the contradiction between achieving thinness for radiation transmission and maintaining sufficient mechanical strength for handling.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the production of thinner, more effective radiation window foils with reduced absorption and improved mechanical strength, allowing for better X-ray transmission and handling, while also enabling the use of alternative materials to beryllium.

Implementation Method 1

A method is disclosed wherein an etchable carrier is used, a surface of the carrier is covered with an etch stop layer, and structural material layers are formed on top of the etch stop layer. The completed stack of layers is attached to a support structure, after which the etchable carrier is etched away to leave only a foil comprising the structural material, etch stop, and possible other layers.

Methodology Applied

Scientific EffectEtching:

Implementation Method 2

A method using an etchable carrier with an etch stop layer and thin film deposition to create a beryllium or alternative material layer as a mesh structure

Methodology Applied

Scientific EffectThin film deposition: Physical Vapour Deposition

Data Source

PatentEP2589062B1Radiation window with good strength properties, and method for its manufacturing

Publication Date: 2021.09.01 AMETEK FINLAND OY

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AI summary

A radiation window foil for an X-ray radiation window comprises a mesh that defines a number of openings (902), said mesh having a first side surface (903) and a second side surface (904). A layer (906) spans said openings. Said layer (906) is on the first side of the mesh but spans said openings at a level closer to the second side surface (904) of the mesh than the first side surface (903) of the mesh.