Etching Byproduct Filter Placement Before Discharge Pipe Bends
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Solution Overview
Problem
During semiconductor manufacturing, etching byproducts accumulate at turning points in discharge pipes, requiring disassembly and cleaning of the entire pipe, which is inconvenient and time-consuming.
Innovation Solution
A filter is disposed proximal to the outlet of the etching tool and in front of the turning point in the discharge pipe, trapping etching byproducts and preventing their accumulation at the turning point, allowing for easy cleaning and reinstallation of the filter.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the discharge pipe is cleaned by disassembly, then etching byproducts are removed, but the operational time and complexity increase
Solution Approach 1:
The discharge pipe system is segmented into a removable filter component and a fixed pipe body. The filter can be independently accessed, removed, cleaned, and reinstalled without disassembling the entire pipe system, thus maintaining cleaning effectiveness while significantly reducing operational time and complexity.
2Reliability
If the entire discharge pipe is disassembled for cleaning, then all byproducts are removed, but the device complexity and difficulty of operation increase
Solution Approach 1:
The filter is extracted as a separate, independently removable component from the discharge pipe system. This extraction allows operators to access and clean the filter portion containing byproducts without disassembling the entire pipe system, thereby maintaining cleaning completeness while dramatically improving operational convenience.
3Object-generated harmful factors
If a filter is installed in the discharge pipe, then byproduct accumulation at turning points is prevented, but the device complexity increases
Solution Approach 1:
A filter is introduced as an intermediary component between the etching tool outlet and the turning point in the discharge pipe. This filter intercepts and traps byproducts before they can accumulate at the turning point, preventing the harmful accumulation effect while adding only a single, manageable component to the system.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The filter effectively prevents etching byproducts from accumulating at turning points, reducing the need for extensive pipe disassembly and cleaning, thereby improving operational efficiency and convenience.
Implementation Method 1
a solidifier configured to solidify the etching byproduct by freezing or heating
Data Source
AI summary
The present disclosure provides a mechanism for filtering an etching byproduct during semiconductor fabrication. The mechanism includes: an etching tool, configured to etch a portion of a material layer and having an outlet for discharging the etching byproduct formed from the etched portion of the material layer; a pipeline, for allowing the etching byproduct to flow through, the pipeline having a first end connected to the outlet of the etching tool and a second end distal to the first end and the etching tool; and a filter, disposed between the first end and the second end and configured to filter the etching byproduct. The filter includes a solidifier configured to solidify the etching byproduct by freezing or heating, and a medium configured to retain the etching byproduct solidified by the solidifier.