Etching Mask Structure for 3D Mode Converter Fabrication
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Solution Overview
Problem
Existing methods for increasing the mode size of optical waveguides to match that of optical fibers are either complex or limited in integration, and current mode conversion technologies face challenges in simplifying the manufacturing process.
Innovation Solution
An etching mask structure is used to fabricate a 3D mode converter, allowing for the simple manufacturing of optical waveguides with a 3D mode converter by etching only the input and output interface areas, using a separate etching mask structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If additional lithography and etching processes are used to increase waveguide width or height, then mode size is improved, but device complexity increases
Solution Approach 1:
The patent divides the waveguide structure into different height regions (first height in interface areas, second height in process areas) by selectively etching only specific regions. This segmentation allows different portions of the waveguide to have different dimensions optimized for their specific functions, achieving mode size control without requiring additional lithography steps for the entire structure.
Solution Approach 2:
The invention applies local quality by creating regions with different waveguide heights tailored to specific functional requirements. The interface areas have a first height optimized for coupling, while the process areas have a second height optimized for light confinement and processing. This local differentiation achieves mode size control through spatially varying structure rather than uniform dimensional changes.
2Manufacturing precision
If lensed fiber or tapered fiber is used to reduce optical fiber mode size, then mode size is improved, but alignment precision and assembly time worsen
Solution Approach 1:
Instead of modifying the optical fiber to match the waveguide mode size (lensed/tapered fiber), the invention inverts the approach by modifying the waveguide structure itself to have varying heights that adapt to coupling requirements. This reverses which component needs precise alignment control, making the rigid waveguide structure the adaptive element rather than the flexible fiber.
3Manufacturing precision
If thin optical waveguide is used to increase mode size, then mode size is improved, but integration capability worsens due to large bending radius
Solution Approach 1:
The patent implements local quality by creating thin-waveguide-like regions (first height) only in the interface areas where mode size expansion is needed for coupling, while maintaining thicker waveguide regions (second height) in the process areas for strong light confinement and small bending radius. This spatial differentiation allows the structure to exhibit both large mode size and high integration capability in different locations.
Data Source
AI summary
The present invention relates to an etching mask structure for fabricating a 3D mode converter and a method of manufacturing an optical waveguide having a 3D mode converter using the same, which allows an optical waveguide having a 3D mode converter to be capable of being manufactured through a simple process. The etching mask structure may include: an etching mask in the form of a bar, positioned in a process area where optical information processing is conducted, to prevent an optical waveguide film layer stacked on the process area from being etched when an etching process is performed; and supports each formed at both ends of the etching mask to support the etching mask.