Etching Chamber Recipe Switching for Continuous Multi-Recipe Operation
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Solution Overview
Problem
The traditional multi-chamber multi-recipe switching workflow in semiconductor etching processes is prone to manual errors and inefficiencies, leading to economic losses and reduced yield due to manual operation errors and the need for machine shutdowns during recipe switching.
Innovation Solution
A control method and apparatus that automatically switch etching machines to target hybrid process recipe operation groups based on reserved process recipes and switching rules, eliminating the need for manual intervention and ensuring continuous operation by matching etching chamber conditions with recipe requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual process recipe switching is implemented, then operators can regulate and test new etching chambers according to operation requirements, but manual operations are prone to errors or omissions resulting in economic losses
Solution Approach 1:
The system enables automatic self-service switching of process recipes by the etching machine itself. The control system automatically selects and switches between different process recipes based on real-time monitoring of etching chamber conditions, eliminating the need for manual operator intervention. This self-service mechanism resolves the contradiction by maintaining operational simplicity while eliminating human error through automated decision-making and execution.
Solution Approach 2:
The patent replaces the manual mechanical operation system with an automated control system. The mechanical action of operators manually switching recipes is substituted by an electronic control system that automatically monitors chamber conditions and executes recipe switching. This substitution eliminates human error while maintaining the functional capability of recipe switching, thereby improving reliability without sacrificing ease of operation.
2Adaptability or versatility
If the etching machine stops the current etching process recipe before switching to a new etching process recipe, then the machine can switch to a new recipe, but this results in idling and capacity loss of the etching machine
Solution Approach 1:
The system performs preliminary actions by pre-evaluating multiple candidate process recipes against real-time etching chamber conditions before switching occurs. The control system predicts which recipe will be most suitable for the current chamber state and prepares the switching sequence in advance. This preliminary action enables seamless transitions without requiring the machine to stop, thereby maintaining productivity while achieving necessary recipe adaptability.
Solution Approach 2:
The patent implements continuous useful action by enabling the etching machine to switch between process recipes without stopping operation. The automated control system maintains continuous etching processes while dynamically switching recipes based on real-time chamber monitoring. This eliminates idle time and capacity loss, ensuring the machine remains productive throughout the entire switching process while maintaining the ability to adapt to different recipe requirements.
3Adaptability or versatility
If multiple process recipes are operated on the same etching chamber, then the machine can handle different process requirements, but the machine needs to stop and switch recipes resulting in capacity loss
Solution Approach 1:
The system applies dynamics by making the process recipe selection adaptive and dynamic rather than static. The control system continuously monitors etching chamber conditions and dynamically adjusts recipe selection in real-time based on changing parameters. This dynamic approach allows the same etching chamber to handle multiple different process recipes without stopping, as the system automatically adapts to the current chamber state and selects the appropriate recipe, thereby eliminating idle time while maintaining multi-recipe versatility.
Data Source
AI summary
Embodiments of the present disclosure provide a control method and apparatus for hybrid process recipes, and a device and a medium. The control method includes: acquiring hybrid process recipe operation groups associated with process recipes operated by etching chambers of an etching machine, where different process recipes correspond to different hybrid process recipe operation groups; acquiring a switching rule of different hybrid process recipe operation groups; and controlling, based on a reserved process recipe for a real-time reserved demand of a target etching chamber and a requirement of the switching rule, the etching machine to automatically switch to a target hybrid process recipe operation group associated with the reserved process recipe.