EUV Beam Alignment via Movable Mirror and Optical Unit
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Solution Overview
Problem
Current EUV light source devices face challenges in efficiently aligning the irradiation positions of multiple energy beams, leading to suboptimal plasma density and increased costs due to trial-and-error adjustments and the need for EUV radiation during alignment processes.
Innovation Solution
An apparatus and method for energy beam position alignment using a movable mirror and optical unit to reflect and direct the second energy beam in the same direction as the first energy beam, with a beam detecting unit to monitor and adjust the incident positions, allowing for precise alignment without generating EUV radiation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If trial-and-error adjustments are used to align energy beams, then alignment can be achieved, but alignment time increases and manufacturing precision deteriorates
Solution Approach 1:
The patent applies preliminary action by pre-positioning the second energy beam using calculation based on positional information from the first energy beam and optical path length differences. This eliminates the need for trial-and-error adjustments, achieving precise alignment immediately without time-consuming iterative processes.
Solution Approach 2:
The patent uses an intermediary approach by introducing a beam detecting unit that provides positional information about the first energy beam. This intermediary measurement system enables calculated positioning of the second beam, serving as a mediator between the two beams to achieve precise alignment without direct trial-and-error interaction.
2Measurement precision
If EUV radiation is used during alignment processes, then beam positions can be monitored, but electric power consumption increases
Solution Approach 1:
The patent applies preliminary action by performing beam position detection and alignment calculations before EUV radiation generation. The beam detecting unit measures positions in advance, and the control unit calculates the optimal position for the second beam beforehand, eliminating the need for continuous EUV radiation during alignment and reducing power consumption.
Solution Approach 2:
The patent uses copying by creating a positional map of the first energy beam using the beam detecting unit. This copied positional information is then used to calculate and position the second beam, replacing the need for actual EUV radiation during the alignment process and significantly reducing energy consumption.
3Quantity of substance
If multiple energy beams are used to generate plasma, then plasma density can be increased, but alignment complexity increases
Solution Approach 1:
The patent applies universality by using the same beam detecting unit and control unit for both detecting the first energy beam position and calculating the second energy beam position. This multi-functional approach simplifies the alignment system despite using multiple energy beams, as the same components serve multiple purposes in the alignment process.
Solution Approach 2:
The patent uses feedback by continuously monitoring the position of the first energy beam with the beam detecting unit and using this feedback information to calculate and adjust the position of the second energy beam. This feedback mechanism enables precise alignment of multiple beams without requiring complex manual adjustment systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables quick and cost-effective alignment of energy beams, reducing the need for EUV radiation during alignment and minimizing electric power consumption, while ensuring accurate positioning for efficient EUV light generation.
Implementation Method 1
an optical unit configured to allow the first energy beam to pass therethrough, and to reflect the second energy beam reflected by the movable mirror and direct the second energy beam in a same direction as a travelling direction of the first energy beam
Implementation Method 2
a beam detecting unit configured to detect an incident position of an incident energy beam
Data Source
AI summary
A light source device irradiates a material with a first beam, and directs a second beam toward a first position on the material, which is irradiated with the first beam. An alignment mechanism includes an optical unit to allow the first beam to pass therethrough, and to reflect the second beam and direct the second beam in a same direction as the first beam. The alignment mechanism also includes a mirror to reflect the second beam, a beam detecting unit, and a branching unit to receive the first beam which has passed the optical unit and the second beam which is reflected by the optical unit. The mirror adjusts an incident position of the second beam on the optical unit. The branching unit adjusts the first position of the first beam on the material and a second position of the second beam on the material.