EUV Bucket Cover Heating to Prevent Target Material Blockage

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Solution Overview

Problem

Debris from target material droplets in an EUV radiation source vessel leads to contamination and blockages, reducing EUV light generation and increasing downtime, thereby decreasing semiconductor device yield and throughput.

Innovation Solution

A heating system is employed to maintain the liquified target material in a liquid state by heating the cover of a bucket and conduits, preventing solidification and blockages, thus ensuring consistent EUV light generation and reducing contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the target material is allowed to cool and solidify in the bucket, then the target material can be collected and stored, but the liquified target material may solidify in the conduits causing blockages and contamination

Engineering Contradiction:

Improveblockage preventionVSAvoidheating energy consumption

Core Design Contradiction:

ReliabilityVSUse of energy by stationary object

Solution Approach 1:

The system dynamically adjusts the temperature parameter of the heating elements to maintain the target material in a liquid state within the conduits. By controlling the temperature above the melting point during transport and allowing controlled solidification only in the bucket, the system prevents blockages while managing energy consumption efficiently

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The heating elements are activated before the target material enters the conduits and continue heating during transport. This preliminary and continuous heating action ensures the material remains liquid throughout the transport path, preventing solidification and blockages before they can occur

Inventive Principle:

Principle #10Preliminary action

2Productivity

If the heating system is activated to prevent solidification, then blockages are prevented, but energy consumption increases

Engineering Contradiction:

ImprovethroughputVSAvoidheating energy consumption

Core Design Contradiction:

ProductivityVSUse of energy by stationary object

Solution Approach 1:

The system incorporates temperature sensors that monitor the state of the target material in real-time. Based on this feedback, the controller dynamically adjusts the heating power to maintain the material in a liquid state only when necessary during transport, reducing energy consumption while ensuring continuous operation and high throughput

Inventive Principle:

Principle #23Feedback

Solution Approach 2:

The heating system transitions from a static on/off control to a dynamic variable power system. The heating elements can adjust their power output based on the flow rate, temperature, and transport duration, optimizing the balance between maintaining liquidity for high throughput and reducing energy consumption

Inventive Principle:

Principle #15Dynamics

3Productivity

If the target material flows continuously into the bucket, then productivity is maintained, but solidification and blockages may occur in the conduits

Engineering Contradiction:

ImprovethroughputVSAvoidblockage prevention

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The heating elements act as an intermediary between the target material and the conduits. By applying thermal energy through this intermediary, the system maintains the material in a liquid state during transport, enabling continuous flow and high productivity while preventing direct contact between solidifying material and conduit walls that would cause blockages

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution maintains a consistent target dosage of EUV radiation, increases semiconductor device yield, and reduces downtime by preventing blockages and contamination in the EUV radiation source.

Implementation Method 1

a heating system that provides heat to a cover of the bucket

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

prevent the liquified target material from solidifying on an interior surface of the cover

Methodology Applied

Scientific EffectPhase change prevention: Phase Change

Data Source

PatentUS20260095978A1Semiconductor processing tool and methods of operation

Publication Date: 2026.04.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

Some implementations described herein incorporate a heating system to heat a cover of a bucket. A liquified target material, collected by vanes and/or a transport ring within a vessel of an extreme ultraviolet (EUV) radiation source, flows through a drain port of the transport ring and through a conduit that provides the liquified target material to the bucket through an opening of the cover. By heating the cover, the heating system prevents the liquified target material from solidifying at or near the opening before the liquified target material can flow into the bucket. By preventing the solidifying of the liquid target material, a likelihood of a blockage within the conduit and/or the drain port is reduced.