Flexible Vacuum Seal Layout for EUV Camera Alignment
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Solution Overview
Problem
The challenge of adjusting an EUV camera in a mask inspection apparatus is constrained by limited installation space and the need to maintain vacuum conditions, which complicates the positioning and focusing of the camera relative to the projection lens.
Innovation Solution
A vacuum seal component with a flexible wall portion is arranged radially outside the central axis of the EUV camera, allowing for tilting adjustments while maintaining vacuum integrity, utilizing a fold structure or bellows design to save axial space and enable position manipulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the EUV camera position is made adjustable relative to the projection lens, then the imaging quality can be optimized, but the installation space requirements increase significantly
Solution Approach 1:
The patent makes the vacuum housing adjustable relative to the projection lens using a positioning mechanism with multiple degrees of freedom, allowing dynamic adjustment of the camera position to optimize imaging quality while maintaining a compact overall structure. The housing can be positioned in multiple orientations and locations without requiring excessive installation space.
Solution Approach 2:
The EUV camera is integrated within the adjustable vacuum housing, which itself is positioned within the limited space of the projection exposure apparatus. This nested arrangement allows the camera system to be compact while still providing adjustable positioning capabilities for optimal imaging.
2Ease of operation
If the distance between the camera and vacuum housing is increased for adjustment, then position manipulation is enabled, but defocusing occurs in the generated camera image
Solution Approach 1:
The positioning mechanism allows dynamic adjustment of the vacuum housing position while maintaining precise control over the distance between the camera and projection lens. This enables easy position manipulation for optimal imaging while preventing excessive distance changes that would cause defocusing.
Solution Approach 2:
The system incorporates feedback mechanisms to monitor and maintain the optimal distance between the camera and projection lens during adjustment, ensuring that focus accuracy is preserved while still allowing necessary position manipulation for imaging optimization.
Data Source
AI summary
A mask inspection apparatus, a vacuum seal component and a method for adjusting a mask inspection apparatus. A mask inspection apparatus comprises a vacuum housing, an EUV camera mounted on the vacuum housing, and a projection lens, arranged in a vacuum chamber of the vacuum housing, for imaging at least one section of an EUV mask onto an image sensor of the EUV camera, wherein a vacuum seal component having a flexible wall portion is arranged between the vacuum housing and the EUV camera or a camera holder of this EUV camera, and wherein this flexible wall portion is arranged radially outside of a central axis of the EUV camera or of the camera holder.