Non-Shrinking Adhesive for EUV Capillary Tube Actuator
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Solution Overview
Problem
Existing EUV light source systems face mechanical coupling issues due to adhesives that shrink during curing, leading to delamination and reduced performance.
Innovation Solution
A system using a capillary tube mechanically coupled to an actuator with an adhesive that remains the same or expands during curing, such as benzoxazine or cyanate ester resin, which maintains robust mechanical coupling and prevents delamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional adhesives are used to mechanically couple the actuator and capillary tube, then the adhesive initially provides mechanical coupling, but the adhesive shrinks during curing causing delamination and reduced reliability
Solution Approach 1:
The patent changes the chemical composition parameters of the adhesive to achieve non-shrinking or expanding properties during curing. Specifically, it uses adhesives containing benzoxazine, cyanate ester, or imide groups which undergo polymerization reactions that maintain or increase volume, preventing the delamination caused by traditional shrinking adhesives
Solution Approach 2:
The patent employs composite adhesive formulations combining multiple polymer components (acrylate, vinyl, epoxy, polyester, polyurethane, phenolic, melamine, or carboxymethyl cellulose) with functional groups (benzoxazine, cyanate ester, imide) to achieve both strong bonding and non-shrinking/expanding volume characteristics during curing
2Strength
If the adhesive shrinks during curing, then the adhesive initially fills the gap between components, but shrinkage creates voids and reduces bonding strength
Solution Approach 1:
The patent modifies the polymerization parameters of the adhesive chemistry to ensure volume maintenance or expansion. The selected adhesive systems (benzoxazine, cyanate ester, imide-containing polymers) undergo curing reactions that either maintain constant volume or expand slightly, eliminating the volume loss and void formation associated with traditional shrinking adhesives
Solution Approach 2:
The patent applies adhesives with built-in volume compensation capabilities before the curing process begins. The non-shrinking or expanding adhesive formulation acts as a cushioning mechanism that compensates for any potential volume reduction, ensuring continuous contact and strong bonding between the actuator and capillary tube throughout curing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The adhesive maintains a stable mechanical connection between the capillary tube and actuator, enhancing the performance and reliability of the EUV light source by preventing delamination and ensuring consistent target formation.
Implementation Method 1
the adhesive being configured to mechanically couple the actuator and the capillary tube. The adhesive occupies a volume that remains substantially the same or expands as a result of curing
Implementation Method 2
the actuator vibrates the tube to form a stream of target material droplets
Implementation Method 3
During operational use, the exterior wall may be heated to a temperature that is greater than a curing temperature of the adhesive
Data Source
AI summary
A system for an extreme ultraviolet light source includes a capillary tube, the capillary tube including a sidewall extending from a first end to a second end, the sidewall including an exterior wall and an interior wall, the interior wall defining a passage that extends from the first end to the second end; an actuator configured to be positioned at the exterior wall of the capillary tube; and an adhesive between the exterior wall and the actuator, the adhesive being configured to mechanically couple the actuator and the capillary tube, wherein the adhesive occupies a volume that remains substantially the same or expands as a result of curing.