EUV Source Catcher Cooling for Tin Debris Heat Dissipation
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Solution Overview
Problem
Existing EUV radiation source apparatuses face challenges in efficiently dissipating heat generated from the collision of a tin layer and a laser beam, leading to inefficient operation and reduced service life due to the accumulation of fuel debris, which complicates the cleaning process.
Innovation Solution
The apparatus includes a catcher to collect fuel debris, a heat dissipation structure with grooves and bumps on the catcher's surface to dissipate heat, and a venting system to cool the chamber, enhancing the efficiency of heat removal and maintaining a stable operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If heat dissipation structures are added to the catcher, then heat removal efficiency is improved, but device complexity increases
Solution Approach 1:
The catcher surface is modified with localized grooves and bumps rather than uniform modification throughout. The grooves are positioned specifically in regions where fuel debris accumulates and heat generation is highest, while the bumps are strategically placed to enhance convective heat transfer in those same critical zones. This localized modification approach improves heat removal efficiency where needed most while minimizing the overall increase in device complexity.
2Productivity
If fuel debris is collected on the catcher, then recycling efficiency is improved, but heat accumulation increases
Solution Approach 1:
The catcher incorporates grooves and bumps in specific regions where fuel debris tends to accumulate during operation. These localized surface features enhance heat transfer coefficients precisely in the debris accumulation zones, allowing efficient heat removal from the collected fuel debris without requiring modification of the entire catcher structure. This enables effective debris collection and recycling while simultaneously managing the heat generated in these critical regions.
3Stability of the object's composition
If the chamber is cooled by venting gas, then temperature stability is improved, but loss of substance increases
Solution Approach 1:
The cooling function is extracted from the chamber environment and applied directly to the catcher through integrated heat dissipation structures. By providing dedicated cooling pathways through the catcher's grooves and bumps, the system removes heat at its source rather than attempting to cool the entire chamber volume through gas venting. This localized cooling approach stabilizes the temperature of the fuel debris collection area while minimizing gas loss from chamber venting.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the recycling efficiency of fuel debris, stabilizes the EUV radiation source, and extends its service life by effectively managing heat and debris accumulation, ensuring minimal variation in EUV brightness.
Implementation Method 1
a heat dissipation structure disposed over the catcher and configured to dissipate heat from the catcher to the chamber
Implementation Method 2
dissipate heat from the catcher to the chamber
Implementation Method 3
a venting system coupled to the EUV source vessel and communicable with the chamber... venting a first gas out of the EUV source vessel to cool the chamber
Implementation Method 4
a tin layer disposed on the crucible... collision of the tin layer and a laser beam
Implementation Method 5
converting a fuel material from a liquid state into a plasma state. In the plasma state, the fuel material emits photons having the desired wavelength
Data Source
AI summary
An EUV radiation source apparatus includes an EUV source vessel including a chamber; a crucible disposed in the chamber; a tin layer disposed on the crucible; a catcher disposed in the chamber and configured to collect fuel debris generated from a collision of the tin layer and a laser beam; a heat dissipation structure disposed over the catcher; and a venting system coupled to the EUV source vessel and communicable with the chamber. A method for generating EUV radiation includes: collecting fuel debris on a catcher disposed in a chamber of an EUV source vessel; dissipating heat from the catcher to the chamber; and venting a gas out of the EUV source vessel to cool the chamber to a decreased temperature through an opening disposed on the EUV source vessel.