EUV Light Generation Apparatus Modular Chamber Maintenance

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Solution Overview

Problem

Current extreme ultraviolet light generation apparatuses face challenges in efficient maintenance, particularly in replacing optical components like the EUV light condenser mirror, which requires cumbersome crane operations and results in prolonged downtime due to the need for handling heavy objects and re-adjusting sensors.

Innovation Solution

The apparatus is designed with a modular structure allowing the optical base and chamber module to be separated and replaced collectively, using a dedicated trolley for moving the chamber module, and pre-adjusting the optical axis in the chamber module before shipment to minimize re-adjustment time during maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If the chamber module is integrated with the optical base, then the structural stability is improved, but the maintenance complexity increases due to cumbersome crane operations and prolonged downtime

Engineering Contradiction:

Improvestructural stabilityVSAvoidmaintenance complexity

Core Design Contradiction:

Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The system is divided into two separable modules: the optical base and the chamber module. The chamber module can be detached from the optical base, allowing maintenance operations to be performed on the chamber module independently without requiring crane operations or extensive disassembly of the entire system. This segmentation resolves the contradiction by maintaining structural stability during operation while enabling simple maintenance procedures.

Inventive Principle:

Principle #1Segmentation

2Ease of manufacture

If the chamber module is replaced without pre-adjustment, then the manufacturing simplicity is improved, but the maintenance time increases due to extensive sensor re-adjustment

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidmaintenance time

Core Design Contradiction:

Ease of manufactureVSLoss of time

Solution Approach 1:

The optical axis is pre-adjusted and optimized within the chamber module during manufacturing before it is installed in the exposure apparatus. This preliminary adjustment ensures that when the chamber module is replaced during maintenance, the optical alignment is already correct, eliminating the need for time-consuming sensor re-adjustment operations. The maintenance time is reduced from approximately 27.5 hours to about one hour.

Inventive Principle:

Principle #10Preliminary action

3Ease of operation

If the optical base and chamber module are moved together, then the handling simplicity is improved, but the maintenance efficiency decreases due to inability to access chamber module for replacement

Engineering Contradiction:

Improvehandling simplicityVSAvoidmaintenance efficiency

Core Design Contradiction:

Ease of operationVSProductivity

Solution Approach 1:

The system is designed with a detachable connection between the optical base and chamber module, allowing the chamber module to be separated and moved independently on a dedicated trolley. This enables maintenance personnel to access and replace the chamber module without moving the entire optical base, significantly improving maintenance efficiency while keeping the handling process simple through the dedicated trolley system.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This modular approach significantly reduces maintenance downtime from approximately 27.5 hours to about one hour, streamlining the replacement process and reducing the need for extensive crane operations and sensor re-adjustment.

Implementation Method 1

a laser beam condensation optical system configured to condense the laser beam having transmitted through the window

Methodology Applied

Scientific EffectLaser: Laser

Implementation Method 2

a chamber in which extreme ultraviolet light is generated

Methodology Applied

Scientific EffectPlasma: Plasma

Implementation Method 3

a condenser mirror disposed inside the chamber and configured to condense extreme ultraviolet light generated inside the chamber

Methodology Applied

Scientific EffectReflection: Reflection

Implementation Method 4

a window configured to transmit, into the chamber, a laser beam introduced into the optical base

Methodology Applied

Scientific EffectTransmission:

Data Source

PatentUS11036150B2Extreme ultraviolet light generation apparatus and maintenance method

Publication Date: 2021.06.15 GIGAPHOTON INC

AI summary

An extreme ultraviolet light generation apparatus includes: an optical base; and a chamber module replaceable from the optical base. The chamber module includes a chamber in which extreme ultraviolet light is generated, a condenser mirror disposed inside the chamber and configured to condense extreme ultraviolet light generated inside the chamber, a window configured to transmit, into the chamber, a laser beam introduced into the optical base, and having a function to seal up the chamber, and a laser beam condensation optical system configured to condense the laser beam having transmitted through the window.