EUV Source Resonant Charging Circuit Switching Time Control
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Solution Overview
Problem
Existing methods for triggering resonant charging circuits in devices generating short-wavelength radiation based on pulsed discharge plasma face challenges in coordinating switching times and achieving consistent radiation output due to fluctuating parameter values and simplifying assumptions that neglect the effects of elements like the degaussing circuit and idealize the DC voltage source, leading to significant errors and difficulties in handling complex topologies.
Innovation Solution
A method that determines switching times through a non-time-critical simulation segment for user-defined parameter values and stores them for retrieval, combined with real-time measurement values in a time-critical segment to accurately calculate second switching times and firing times, allowing for precise control of the resonant charging circuit without simplifying assumptions, thus accommodating any topology complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If simplifying assumptions are made in calculating switching times (neglecting degaussing circuit effects and idealizing DC voltage source), then calculation complexity is reduced, but calculation accuracy deteriorates significantly
Solution Approach 1:
The patent pre-calculates switching times using comprehensive simulation that accounts for all circuit elements including degaussing circuit and non-ideal DC voltage source characteristics. These pre-calculated values are stored and retrieved during operation, eliminating the need for complex real-time calculations while maintaining high accuracy.
Solution Approach 2:
The patent creates a detailed simulation model that copies the actual resonant charging circuit behavior, including all components and their non-ideal characteristics. This virtual model is used to pre-determine switching times, replacing the need for simplified analytical calculations during real operation.
2Measurement precision
If comprehensive simulation is used to account for all circuit elements (degaussing circuit, non-ideal DC source), then calculation accuracy is improved, but computational effort increases
Solution Approach 1:
The patent performs comprehensive simulations and determines switching times in advance, before actual operation begins. The results are stored in lookup tables or databases. During real-time operation, pre-determined switching times are simply retrieved based on measured parameter values, requiring minimal computational effort.
Solution Approach 2:
The patent separates the computational process into two distinct phases: an offline phase where comprehensive simulations are performed and results are stored, and an online phase where only simple parameter measurements and table lookups are required. This segmentation moves the computationally intensive work to when it doesn't impact real-time operation.
3Productivity
If switching times are determined based on simplified models, then real-time calculation speed is maintained, but adaptability to complex topologies deteriorates
Solution Approach 1:
The patent creates a universal simulation framework that can model any resonant charging circuit topology, regardless of complexity. The same comprehensive simulation approach used for simple circuits can be applied to complex topologies, making the method universally applicable while maintaining accuracy.
Solution Approach 2:
The patent uses detailed simulation models that accurately copy the behavior of any specific circuit topology. By creating virtual representations of the actual circuits with all their components and characteristics, the method can adapt to any topology without requiring simplified assumptions.
4Reliability
If parameter values are allowed to fluctuate (voltage differences, component values, plasma efficiency), then real operating conditions are reflected, but coordination of switching times becomes more difficult
Solution Approach 1:
The patent measures actual parameter values (such as DC voltage, component values) before determining switching times. These measured values are used as inputs to the simulation or lookup process, allowing the switching times to be adjusted based on actual operating conditions. This feedback mechanism handles parameter fluctuations automatically.
Solution Approach 2:
The patent determines switching times as functions of various parameter values (voltage, component values, temperature). By allowing these parameters to vary and using them as inputs to the switching time determination process, the system adapts to changing operating conditions while maintaining coordinated switching.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides precise and efficient calculation of switching times and firing times, reducing errors and enabling consistent radiation output, even with complex topologies, by simulating the resonant charging circuit's behavior and using actual measurement values to correct for fluctuations, resulting in improved accuracy and flexibility compared to prior methods.
Implementation Method 1
a (resonant) charging circuit with a pulsed capacitor or capacitor bank... a virtually sinusoidal current flow through the inductor develops during this phase... the energy stored in the inductor is decreased through a further rise in voltage at the pulsed capacitor
Implementation Method 2
resonant charging circuit... At a third point in time which is defined by the current zero crossing of the inductor, the plasma is ignited
Implementation Method 3
the available energy flows along the channel, thereby exciting emission of a plasma of an emitter material... Devices for generating short-wavelength radiation based on a discharge plasma
Data Source
AI summary
A method for triggering a resonant charging circuit for a device for generating short-wavelength radiation based on discharge plasma is described. Switching times of the resonant charging circuit are determined in a non-time-critical method segment by simulation and are stored to be repeatedly retrievable. Measurement values of the resonant charging circuit are determined in real time in a time-critical method segment. At least one second switching time (t2) at which a discharging switch of the resonant charging circuit is triggered in order to supply at a firing time (t3) a discharge voltage (Uwanted), and the firing time (t3) are calculated. The device has a first input unit, a first simulation unit, a first regression unit, a first measurement value unit, a first evaluation unit and a control unit for triggering a discharging switch of the resonant charging circuit.