EUV Component Box Segmentation for Maintenance Access
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Solution Overview
Problem
The existing electric component boxes for extreme ultraviolet light generation apparatuses often hinder the securing of a working space for maintenance due to their fixed arrangement, which complicates operations like mirror replacement and target supply unit maintenance.
Innovation Solution
The proposed electric component box design includes a first box that can be fixed to a placement surface and a second box that can be switched between a fixed and movable state, with a connection device allowing the second box to be rotatable and adjustable in height relative to the first box.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the electric component box is arranged in a fixed manner, then the structure is simple and stable, but the working space for maintenance is insufficient
Solution Approach 1:
The electric component box is divided into a first box and a second box that are separately arrangeable. The second box can be positioned independently to create maintenance working space, while the first box remains fixed for structural stability. This segmentation allows the maintenance space to be secured without requiring complete reconfiguration of the entire box structure.
Solution Approach 2:
The second box is designed with movable characteristics, allowing it to be positioned flexibly to create necessary working space for maintenance operations. The box can be moved to appropriate positions and then fixed, providing dynamic adaptability for maintenance activities while maintaining overall structural stability through the first box.
2Ease of operation
If the second box is made movable to facilitate maintenance, then the ease of operation improves, but the reliability of wiring connections may be compromised
Solution Approach 1:
The second box is equipped with fixing mechanisms that allow it to be securely fixed to the placement surface when in the working position. This preliminary fixing action ensures that the box remains stable during maintenance operations, preventing any movement that could strain or damage the wiring connections, while still allowing easy movement when repositioning is needed.
3Volume of moving object
If the electric component box is made compact, then the space utilization improves, but the maintenance accessibility deteriorates
Solution Approach 1:
By dividing the electric component box into separate first and second boxes, the design achieves compact overall dimensions while allowing the second box to be independently positioned for maintenance access. The segmented structure enables maintenance personnel to access specific components without requiring the entire box to be large or fully disassembled.
Solution Approach 2:
The second box can be moved in vertical or horizontal directions to create accessible working space, utilizing spatial dimensions efficiently. This allows the compact box design to provide adequate maintenance accessibility by strategically positioning the second box in appropriate spatial locations rather than increasing overall box volume.
Data Source
AI summary
An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.