EUV Debris Mitigation Temperature Control for Tin Deposit Management
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Solution Overview
Problem
Existing debris mitigation systems in EUV radiation sources for lithographic apparatuses are complex, inefficient, and result in undesirably large temperature gradients, leading to issues like tin wool formation, tin spitting, and reduced optical element performance.
Innovation Solution
A temperature control system using high-pressure water or gas conduits to selectively heat or cool components of the debris mitigation system, maintaining some components below and others above the fuel's melting point, with all active control devices located outside the vacuum chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If electric heaters and water cooling systems are used to control temperatures of debris mitigation system components, then temperature control capability is provided, but the system becomes complex and inefficient with large temperature gradients
Solution Approach 1:
The patent combines heating and cooling functions into a single integrated temperature control system. The system uses a unified control architecture that manages both heating elements and cooling fluid circulation through common control logic, reducing the number of separate control systems and simplifying the overall device structure while maintaining precise temperature control capability
Solution Approach 2:
The temperature control system is designed to perform multiple functions: it can heat components to above the fuel melting point for debris removal, cool components to below the melting point for debris capture, and dynamically adjust between these states. This multi-functional approach eliminates the need for separate dedicated heating and cooling systems for different operational modes
2Temperature
If multiple heating and cooling systems are used to maintain different temperatures in the debris mitigation system, then temperature control is achieved, but heating and cooling times increase
Solution Approach 1:
The temperature control system dynamically adjusts operating parameters based on real-time conditions. The controller monitors component temperatures and automatically modulates heating power and cooling fluid flow rates to achieve rapid temperature transitions. This dynamic control allows the system to quickly switch between heating and cooling modes without the delays associated with static, multi-stage temperature control systems
Solution Approach 2:
The system changes operational parameters such as heating power levels and cooling fluid flow rates to optimize temperature control speed. By adjusting these parameters dynamically rather than using fixed settings, the system achieves faster heating and cooling cycles while maintaining the required temperature precision for different operational modes
3Object-affected harmful factors
If debris mitigation components are maintained below fuel melting point to capture debris, then debris capture is improved, but fuel deposits grow in undesirable forms
Solution Approach 1:
The system periodically switches between two temperature regimes: a first mode where components are cooled below the fuel melting point to capture and solidify debris, and a second mode where components are heated above the melting point to melt and remove accumulated fuel deposits. This periodic alternation prevents the formation of undesirable fuel deposit structures by regularly clearing them before they can grow into problematic configurations
Solution Approach 2:
The temperature control system exploits phase transitions of the fuel material. By cooling components below the melting point, the system causes fuel debris to transition from liquid to solid state for easy capture. By periodically heating above the melting point, the system reverses this phase transition to melt accumulated deposits and facilitate their removal, thereby preventing undesirable deposit formation
4Object-affected harmful factors
If components are cooled to below melting point for debris capture, then debris is solidified and captured, but temperature gradients become large and control becomes difficult
Solution Approach 1:
The system introduces a thermal management intermediary - a controllable thermal barrier or insulation layer - between the cooling mechanism and the debris mitigation components. This intermediary allows precise control of heat flow, enabling the components to be cooled to below the fuel melting point for effective debris capture while minimizing excessive temperature gradients and maintaining more uniform temperature distribution across component surfaces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This system provides precise temperature control, reduces heating and cooling times, simplifies maintenance, and enhances the apparatus' throughput by minimizing undesirable phenomena like tin wool and spitting, while maintaining efficient operation.
Implementation Method 1
a temperature control system configured to selectively increase or decrease the temperature of the component by selectively heating or cooling a thermal transfer fluid circulating through the conduit
Implementation Method 2
a thermal transfer fluid circulating through the conduit
Implementation Method 3
an excitation device configured to excite the fuel into a plasma
Implementation Method 4
a collector configured to collect radiation emitted by the plasma
Data Source
AI summary
A radiation source includes a fuel supply, a collector, a debris mitigation system, and a temperature control system. The fuel supply device supplies fuel. The excitation device excites the fuel into a plasma. The collector collects radiation emitted by the plasma and directs the radiation to a beam exit. The debris mitigation system collects debris generated by the plasma and has a first component having a first conduit passing therethrough and a second component having a second conduit passing therethrough. The temperature control system increases or decreases temperatures of the first component and the second component by selectively heating or cooling a thermal transfer fluid circulating through the respective conduit. The temperature control system cools the first component to a first temperature that is below the melting point of the fuel and heats the second component to a second temperature that is above the melting point of the fuel.