Differential Evacuation Device for EUV Light Systems
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In EUV light generation systems, the differential evacuation device's gas flow into the EUV light utilization apparatus increases due to high pressure differences, leading to increased gas pressure and EUV light absorption, which affects the efficiency of the system.
Innovation Solution
The differential evacuation device is designed with a first partition wall inclined relative to the optical path axis, a second partition wall with a smaller opening, and strategically positioned exhaust ports to redirect and reduce the gas flow, ensuring the second opening is outside the high-pressure region, thereby minimizing gas inflow into the EUV light utilization apparatus.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the pressure difference between the first chamber and second chamber is increased to improve evacuation efficiency, then the gas flow rate increases, but the gas pressure in the connection pipe increases causing more EUV light absorption
Solution Approach 1:
The connection pipe is divided into multiple sections by partition walls with different opening sizes. The first partition wall has a first opening and the second partition wall has a second opening smaller than the first opening, creating staged pressure reduction zones that control gas flow while minimizing EUV light absorption.
Solution Approach 2:
Different regions of the connection pipe are given different pressure characteristics through strategically positioned exhaust ports. The first exhaust port is positioned to exhaust gas from a first differential evacuation chamber, creating localized pressure control that redirects gas flow away from the EUV light path.
2Object-affected harmful factors
If the opening size of partition walls is reduced to minimize gas flow into the second chamber, then gas inflow decreases, but the evacuation capability and pressure control become insufficient
Solution Approach 1:
The evacuation system is segmented into multiple chambers separated by partition walls with progressively smaller openings. This staged approach allows each section to handle different aspects of pressure control, maintaining overall evacuation capability while limiting gas flow to the second chamber.
Solution Approach 2:
The first differential evacuation chamber acts as an intermediary zone between the first and second chambers. The first exhaust port exhausts gas from this intermediate chamber, serving as a buffer that prevents direct gas flow from the high-pressure first chamber to the low-pressure second chamber.
3Ease of manufacture
If partition walls are positioned perpendicular to the optical path to simplify structure, then manufacturing is easier, but gas flow directly into the second chamber increases
Solution Approach 1:
The partition walls are positioned asymmetrically relative to the optical path axis, with the first partition wall having a first opening and the second partition wall having a second opening at different positions and orientations. This asymmetric positioning redirects gas flow away from the second chamber while maintaining optical transmission.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces the gas inflow into the EUV light utilization apparatus, minimizing pressure increases and EUV light absorption, enhancing the system's efficiency by aligning the gas flow with the exhaust direction and positioning the second opening outside the high-pressure zone.
Implementation Method 1
a first exhaust port configured to exhaust a gas in a first differential evacuation chamber between the first partition wall and the second partition wall
Implementation Method 2
a first partition wall including a first opening and a first partition plate surrounding the first opening and being arranged such that the extreme ultraviolet light passes through the first opening, a second partition wall including a second opening smaller than the first opening and a second partition plate surrounding the second opening and being arranged such that the extreme ultraviolet light having passed through the first opening passes through the second opening
Data Source
AI summary
A differential evacuation device includes a connection pipe connecting a first chamber which outputs extreme ultraviolet light and a second chamber to which the extreme ultraviolet light is input, a first partition wall including a first opening and a first partition plate being arranged such that the extreme ultraviolet light passes through the first opening, a second partition wall including a second opening and a second partition plate being arranged such that the extreme ultraviolet light passes through the second opening, and a first exhaust port exhausting a gas in a first differential evacuation chamber between the first partition wall and the second partition wall. Here, the first partition wall is arranged such that the second opening is surrounded by a portion outside a first high pressure region where a pressure is highest in pressure distribution at the second partition plate on the first differential evacuation chamber side.