EUV Droplet Generator Refill via Temperature Control
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Solution Overview
Problem
The existing EUV lithography systems face challenges in maintaining the efficiency and throughput of the droplet generator refilling process due to the time-consuming nature of cooling and reheating, which leads to contamination and oxidation issues and reduced operational efficiency.
Innovation Solution
Implementing a temperature control system that allows the droplet generator to be cooled down to a target temperature between 150°C and 224°C for faster refilling, combined with the use of robot arms for automated refilling and swapping of the droplet generator, to reduce the maintenance time and prevent contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the droplet generator is cooled down to room temperature for refilling, then the refilling process can be performed, but the maintenance time increases and productivity decreases
Solution Approach 1:
The patent applies parameter changes by modifying the temperature parameter from room temperature to a controlled range of 150°C to 224°C. This temperature optimization allows the refilling process to be performed without complete cooling, thereby reducing maintenance time while ensuring proper refilling conditions are met
Solution Approach 2:
The patent implements preliminary action by introducing a pre-cooling step that brings the droplet generator to the optimal temperature range of 150°C to 224°C before refilling. This preliminary temperature adjustment enables faster refilling operations compared to cooling to room temperature, thus improving productivity
2Reliability
If the droplet generator is cooled down slowly to room temperature, then contamination and oxidation are prevented, but the maintenance time increases
Solution Approach 1:
The patent changes the temperature parameter from room temperature to a higher optimal range of 150°C to 224°C for refilling operations. This parameter modification reduces the cooling time required while maintaining contamination prevention through controlled temperature management and automated refilling processes
Solution Approach 2:
The patent implements continuity of useful action by maintaining the droplet generator in a controlled temperature state that allows for rapid refilling without complete cooling. The automated refilling system ensures continuous operation and minimizes exposure to contamination risks, achieving both time efficiency and reliability
3Ease of manufacture
If manual refilling is performed, then the process can be completed, but operational efficiency decreases and contamination risk increases
Solution Approach 1:
The patent applies self-service by implementing an automated refilling system that performs the refilling operation without manual intervention. The system automatically controls the temperature, opens the refilling port, introduces new droplets, and seals the system, thereby improving operational efficiency and reducing contamination risk from human contact
Solution Approach 2:
The patent replaces manual mechanical refilling operations with an automated control system that manages the entire refilling process. This substitution includes automated temperature control, port opening/closing mechanisms, and droplet introduction systems, all controlled through programming rather than manual manipulation, thus enhancing productivity and reliability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly shortens the maintenance time, reduces contamination, and enhances the operational efficiency of the EUV lithography process by allowing for faster refilling and minimizing oxidation during the maintenance operation.
Implementation Method 1
cooling down the droplet generator to a temperature not lower than about 150° C.
Implementation Method 2
heating the solid metal material to a temperature above a melting point of the solid metal material to melt the solid metal material
Implementation Method 3
melt the solid metal material
Implementation Method 4
emitting an excitation laser toward the zone of excitation, such that the metal droplet is heated by the excitation laser
Implementation Method 5
the metal droplet is heated by the excitation laser to generate extreme ultraviolet (EUV) radiation
Data Source
AI summary
A method includes following steps. A photoresist-coated substrate is received to an extreme ultraviolet (EUV) tool. An EUV radiation is directed from a radiation source onto the photoresist-coated substrate, wherein the EUV radiation is generated by an excitation laser hitting a plurality of target droplets ejected from a first droplet generator. The first droplet generator is replaced with a second droplet generator at a temperature not lower than about 150° C.