Target Substance Feed Control for EUV Path Clogging
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Solution Overview
Problem
In extreme ultraviolet light generation systems, clogging of solid target substances in supply pipes leads to operational inefficiencies and potential damage, as the supply of target substances is not effectively managed, causing pressure and valve issues.
Innovation Solution
A target substance replenishment device with a processor-controlled supply switching mechanism and detectors to identify clogging, allowing for the suppression or activation of supply based on detection signals, and optionally using vibration devices to clear clogs, ensuring continuous operation and preventing valve biting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If solid target substance is continuously supplied to the supply path, then the target substance supply to the melting chamber is maintained, but clogging occurs in the supply path causing operational failures
Solution Approach 1:
The patent applies vibration devices to the supply path components (supply pipe, valve, container bottom) to prevent solid target substance particles from adhering and clogging the path. The vibration mechanically disrupts particle accumulation, ensuring continuous supply while preventing blockages that would compromise system reliability.
Solution Approach 2:
The patent incorporates detection devices that monitor the supply path for clogging conditions and provide feedback signals. When clogging is detected, the system can activate vibration devices or adjust supply parameters, creating a closed-loop control system that maintains productivity while preventing reliability failures.
2Ease of operation
If valve operation is performed to control target substance flow, then supply regulation is achieved, but valve biting occurs due to clogged target substance
Solution Approach 1:
The patent applies vibration specifically to the valve and surrounding supply path components during valve operation. This vibration prevents target substance particles from adhering to the valve surfaces and mechanism, eliminating the 'valve biting' phenomenon that causes damage while maintaining the valve's ability to regulate supply.
Solution Approach 2:
The patent applies vibration to the valve and supply path before valve operation to pre-prevent particle adhesion. This preliminary action ensures that when the valve operates, no clogged target substance is present to cause biting, thereby protecting the valve while maintaining operational control.
3Speed
If pressure is applied to melt and supply target substance, then the target substance reaches the plasma generation region, but pressure causes solid target substance to clog in the supply path
Solution Approach 1:
The patent applies vibration to the supply path components during pressurized target substance delivery. The vibration counteracts the clogging effect of pressure by preventing particle adhesion to the pipe walls, allowing high-pressure delivery (maintaining speed) without the reliability penalty of blockages.
Solution Approach 2:
The patent uses vibration as an intermediary mechanism between pressure and target substance flow. The vibration mediates the interaction by preventing direct contact and adhesion between pressurized particles and the supply path surfaces, allowing pressure-driven delivery without clogging.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively manages clogging by stopping or adjusting the supply of target substances, preventing valve damage and maintaining system efficiency, thus ensuring stable EUV light generation.
Implementation Method 1
irradiating a target substance with pulse laser light to turn the target substance into plasma
Implementation Method 2
a laser produced plasma (LPP) type apparatus using plasma generated by irradiating a target substance with pulse laser light
Data Source
AI summary
A target substance replenishment device may include a first container containing a solid target substance, a first path through which the solid target substance supplied from the first container passes, a first supply switching device switching between a first state where supply of the solid target substance from the first container to the first path is suppressed and a second state where the supply of the solid target substance from the first container to the first path is allowed, a first valve connected to the first path, a second path which is connected to the first valve and through which the solid target substance having passed through the first valve passes, a first detector outputting a first detection signal indicating that the second path is clogged with the solid target substance, and a processor controlling the first supply switching device to the first state based on the first detection signal.