Replaceable Filter Assembly for EUV Lithography Fuel Droplet Generator
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing fuel droplet generators for EUV radiation sources in lithographic apparatuses face issues with nozzle blockage due to particulate solid impurities, which complicates the replacement of filters and nozzles, leading to potential blockages and contamination risks.
Innovation Solution
A replaceable filter assembly with a rigid support plate and a filter membrane having mutually spaced holes is integrated into the fuel feed line, allowing for effective filtration of molten metal fuels and preventing particulate contaminants from reaching the nozzle, while the filter assembly can be easily replaced to minimize blockage risks.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a filter is integrated into the fuel feed line to remove particulate solid impurities, then the reliability of the fuel droplet generator is improved, but the device complexity increases due to additional components and replacement procedures
Solution Approach 1:
The filter membrane is integrated directly into the fuel feed line structure, merging the filtration function with the existing fuel delivery pathway. This eliminates the need for separate filter housings and complex assembly mechanisms, thereby improving reliability while minimizing additional device complexity
Solution Approach 2:
A filter membrane serves as an intermediary component between the fuel source and the nozzle, capturing particulate solid impurities before they can reach and block the nozzle. This mediator approach protects the critical nozzle component while maintaining a relatively simple overall system structure
2Ease of repair
If filters are made replaceable to maintain fuel purity, then the ease of repair is improved, but the loss of time increases due to replacement operations
Solution Approach 1:
The filter membrane is designed as a replaceable segment within the fuel feed line, allowing it to be independently removed and replaced without disassembling the entire fuel droplet generator. This segmentation enables quick filter replacement while maintaining system integrity, balancing ease of repair with minimal downtime
Solution Approach 2:
The filter membrane is pre-installed in the fuel feed line during manufacturing, positioned optimally before use. This preliminary action ensures that when replacement is needed, only the filter membrane itself needs to be swapped out, reducing the time and complexity of repair operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures reduced risk of nozzle blockage and facilitates the replacement of filters and nozzles, maintaining the integrity of the fuel droplet generator and enhancing the reliability of EUV radiation production for lithographic applications.
Implementation Method 1
A replaceable filter assembly with a rigid support plate and a filter membrane having mutually spaced holes is integrated into the fuel feed line, allowing for effective filtration of molten metal fuels and preventing particulate contaminants from reaching the nozzle
Implementation Method 2
at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated
Implementation Method 3
a laser for exciting a fuel to provide the plasma... directing a laser beam at a fuel, such as particles or droplets of a suitable material (e.g., tin)
Implementation Method 4
A radiation system for producing EUV radiation may include a laser for exciting a fuel to provide the plasma... The resulting plasma emits output radiation, e.g., EUV radiation
Implementation Method 5
The resulting plasma emits output radiation, e.g., EUV radiation, which is collected using a radiation collector
Data Source
AI summary
A radiation source for generating EUV from a stream of molten metal fuel droplets by LPP (Laser Produced Plasma) or (Dual Laser Plasma) has a fuel droplet generator arranged to provide a stream of droplets of fuel and at least one laser configured to vaporise at least some of said droplets of fuel, whereby radiation is generated. The fuel droplet generator has nozzle, fuel supply line, and reservoir, with a pumping device arranged to supply a flow of molten metal fuel from the reservoir through the fuel feed line and out of the nozzle as a stream of droplets. The fuel droplet generator has a replaceable filter assembly in the fuel feed line, arranged to filter the molten metal fuel in use, to deter nozzle blockage by solid particulate impurities in the fuel.