Integrally Formed EUV Filter for Fuel Debris Management
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Solution Overview
Problem
Current EUV radiation source apparatuses face challenges in managing fuel debris, which can splash and contaminate the chamber, requiring time-consuming cleaning and disrupting the generation of extreme ultraviolet radiation.
Innovation Solution
An EUV radiation source apparatus is designed with a first filter comprising a membrane and a mesh integrally formed, disposed in a chamber adjacent to the EUV source vessel, to collect fuel debris and maintain spectral purity, thereby protecting the apparatus and extending its service life.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a filter is not used, then the chamber remains accessible and simple to operate, but fuel debris contaminates the chamber requiring time-consuming cleaning
Solution Approach 1:
The patent extracts the harmful fuel debris from the chamber environment by introducing a filter that captures and retains debris particles. The filter is positioned in the chamber to intercept fuel debris before it can contaminate critical components, thereby separating the debris collection function from the main chamber space and enabling continuous operation without cleaning interruptions.
2Reliability
If a filter is introduced to collect fuel debris, then spectral purity is maintained and contamination is reduced, but device complexity increases
Solution Approach 1:
The patent employs a thin film filter structure that provides effective fuel debris collection while maintaining minimal impact on the optical path and device complexity. The thin film design allows the filter to capture debris particles effectively while preserving EUV radiation transmission, thus maintaining spectral purity without adding significant structural complexity to the system.
3Reliability
If a filter with mesh and membrane is used, then fuel debris collection efficiency is improved, but manufacturing complexity increases
Solution Approach 1:
The patent utilizes a porous membrane structure combined with a mesh layer to create an integrated filter that efficiently collects fuel debris through its porous architecture. The porous material provides multiple capture mechanisms for debris particles while maintaining EUV radiation transmission. This approach achieves high debris collection efficiency through the inherent properties of porous materials rather than complex multi-component assemblies, thereby improving ease of manufacture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively collects fuel debris, reduces contamination, and enhances the stability and efficiency of EUV radiation generation by ensuring continuous operation and improved spectral purity.
Implementation Method 1
A laser beam is collided with a tin layer to generate extreme ultraviolet (EUV) radiation
Implementation Method 2
Methods for generating EUV radiation include converting a fuel material from a liquid state into a plasma state. In the plasma state, the fuel material emits photons having a desired wavelength
Implementation Method 3
a first filter comprising a membrane and a mesh integrally formed, disposed in a chamber adjacent to the EUV source vessel, to collect fuel debris
Data Source
AI summary
An EUV radiation source apparatus includes an EUV source vessel; a tin layer disposed in the EUV source vessel; a chamber disposed adjacent to the EUV source vessel; and a first filter disposed in the chamber, wherein the first filter includes a membrane and a mesh disposed on the membrane, and the membrane and the mesh are integrally formed. A method for generating EUV radiation includes: forming a first filter including a membrane and a mesh integrally formed with the membrane; disposing the first filter in a chamber adjacent to an EUV source vessel; and collecting fuel debris on the first filter in the chamber.