EUV Light Generation Flexible Connection Thermal Stability
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Solution Overview
Problem
Existing EUV light generation systems face challenges in maintaining precise positioning and thermal stability of components due to thermal expansion, which affects the accuracy and efficiency of EUV light production.
Innovation Solution
The system employs a support frame connected to the chamber flexibly via elastic members to maintain the target supply unit, EUV collector mirror, and other components at precise positions, using cooling mechanisms and six-axis stages to minimize thermal deformation and ensure accurate EUV light generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If rigid connections are used to maintain precise positioning, then positioning accuracy is improved, but thermal expansion causes misalignment and reduces stability
Solution Approach 1:
The patent uses flexible connection members (belts) instead of rigid connections to connect the chamber to the frame and to connect the target supply unit to the chamber. These flexible connections can accommodate thermal expansion and contraction of components while maintaining proper positioning, thereby resolving the contradiction between positioning accuracy and thermal stability.
2Manufacturing precision
If rigid structural support is used to maintain component alignment, then alignment precision is improved, but the system becomes more sensitive to thermal deformation
Solution Approach 1:
Flexible connection members are used to connect components, allowing them to move independently in response to thermal deformation while maintaining functional alignment. This eliminates the sensitivity to thermal deformation that would occur with rigid structural support.
3Stability of the object's composition
If flexible connections are used to reduce thermal expansion effects, then thermal stability is improved, but positioning precision may deteriorate
Solution Approach 1:
The flexible connection members are designed with specific properties (elasticity, damping characteristics) that allow them to absorb thermal expansion while maintaining sufficient positioning precision through their mechanical properties and configuration.
Solution Approach 2:
The flexible connection members act as intermediaries between rigid components, mediating the thermal expansion effects while maintaining the functional relationship and positioning between connected components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the precision and stability of EUV light generation by reducing thermal expansion effects, maintaining component alignment, and improving the accuracy of EUV light production, while also reducing the system's size and manufacturing costs.
Implementation Method 1
a first connection member for connecting the frame and the chamber flexibly
Implementation Method 2
a driver laser configured to output a laser beam, with which the target material supplied into the chamber from the target supply unit is irradiated
Implementation Method 3
by exciting a target material to turn the target material into plasma
Implementation Method 4
an LPP (Laser Produced Plasma) type system in which plasma generated by irradiating a target material with a laser beam is used
Implementation Method 5
a mirror, fixed to the frame, for reflecting the laser beam in the chamber
Implementation Method 6
a beam dump positioned to absorb the laser beam reflected by the mirror
Data Source
AI summary
An apparatus for generating extreme ultraviolet light by exciting a target material to turn the target material into plasma may include: a frame; a chamber in which the extreme ultraviolet light is generated; a target supply unit for supplying the target material into the chamber; a first connection member for connecting the frame and the chamber flexibly; a mechanism for fixing the target supply unit to the frame; and a second connection member for connecting the target supply unit to the chamber flexibly.