EUV Fuel System Acoustic Filter for Nozzle Clogging
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Solution Overview
Problem
Contamination in the fuel supply of radiation sources, such as LPP sources, leads to clogging of nozzles, affecting the trajectory and properties of fuel droplets, which can result in suboptimal or failed radiation generation, particularly in EUV lithographic applications where stringent requirements exist for droplet size, shape, and trajectory.
Innovation Solution
A fuel supply system incorporating an acoustic filter that generates ultrasonic standing waves to align and separate contamination particles from the fuel, preventing them from reaching the nozzle and ensuring a clear flow path, thereby maintaining the nozzle's geometry and functionality.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If fuel is supplied through a nozzle to generate plasma for EUV radiation, then radiation generation is enabled, but contamination particles can clog the nozzle affecting droplet trajectory and properties
Solution Approach 1:
The patent applies preliminary action by using an acoustic filter to remove contamination particles from the fuel stream before the fuel reaches the nozzle. This preventive measure ensures that particles are eliminated in advance, preventing nozzle clogging and maintaining reliable radiation generation without interruption.
2Manufacturing precision
If stringent requirements for droplet size, shape and trajectory are maintained, then radiation quality is improved, but any contamination can cause suboptimal or failed radiation generation
Solution Approach 1:
The acoustic filter serves as an intermediary component between the fuel source and the nozzle. It mediates the fuel stream by selectively removing contamination particles while allowing the fuel itself to pass through, thereby protecting the precision requirements for droplet properties and ensuring reliable radiation generation.
3Reliability
If an acoustic filter is introduced to remove contamination particles, then nozzle clogging is prevented, but system complexity increases
Solution Approach 1:
The patent replaces mechanical filtration systems with an acoustic field-based filtering mechanism. Instead of using physical meshes or screens that would require frequent maintenance and create pressure drops, the system uses acoustic waves to levitate and remove particles, simplifying the overall system structure while maintaining fuel flow continuity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The acoustic filter effectively prevents nozzle clogging and maintains the required droplet properties, ensuring stable and accurate radiation generation by removing contamination particles without causing blockages in the fuel flow system, thus enhancing the operational reliability of EUV radiation sources.
Implementation Method 1
A fuel supply system incorporating an acoustic filter that generates ultrasonic standing waves to align and separate contamination particles from the fuel
Implementation Method 2
The acoustic filter effectively prevents nozzle clogging and maintains the required droplet properties, ensuring stable and accurate radiation generation by removing contamination particles
Data Source
AI summary
A fuel supply for an EUV radiation source is disclosed. The fuel supply comprises a reservoir (40) for retaining a volume of fuel (42), a nozzle (32), in fluid connection with the reservoir, and configured to direct a stream of fuel along a trajectory towards a plasma formation location, and a fuel contamination control arrangement (44) which separates contamination particles from the fuel. The contamination control arrangement comprises at least one acoustic filter. The acoustic filter may apply an acoustic standing wave to the fuel. Also disclosed is a method of controlling contamination in such a fuel supply.