EUV Lithography Fuel Cell Reuse for Hydrogen Cleaning Gas
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Solution Overview
Problem
Current EUV lithography systems face challenges with molecular or particulate contamination on imaging surfaces, leading to reduced device output and yield, and high energy consumption due to the burning of hydrogen gases used for cleaning, which are derived from fossil fuels.
Innovation Solution
A system that includes a fuel cell positioned between a pump and a scrubber to reuse spent hydrogen gas from EUV lithography systems, generating electric power and reducing energy consumption, while also facilitating easy maintenance and repair through a structure of multiple fuel cells.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If hydrogen gas is burned in a scrubber to clean the lithography system, then molecular or particulate contamination is removed from imaging surfaces, but energy consumption increases and fossil fuel-derived hydrogen is wasted
Solution Approach 1:
The patent converts the harmful waste hydrogen gas into a beneficial energy source by feeding it to a fuel cell, which generates electricity. This resolves the contradiction by transforming the waste stream that causes energy waste into a power source that reduces external energy consumption while maintaining the cleaning function.
Solution Approach 2:
Instead of discarding the hydrogen gas through combustion in the scrubber, the system recovers it by directing it to a fuel cell for electricity generation. This recovery approach maintains the reliability benefit of hydrogen cleaning while eliminating the energy waste associated with burning the gas.
2Reliability
If hydrogen gas is burned in a scrubber, then contamination is removed, but hydrogen gas derived from fossil fuels is wasted
Solution Approach 1:
The system recovers hydrogen gas that would otherwise be discarded by routing it to a fuel cell for electricity generation. This maintains the contamination removal function while preventing hydrogen waste.
Solution Approach 2:
The waste hydrogen gas is converted into a useful energy resource through the fuel cell, transforming what was previously a loss into a beneficial contribution to power supply.
3Device complexity
If a single fuel cell is used, then the system is simple, but maintenance and repair become difficult
Solution Approach 1:
The fuel cell system is divided into multiple modular units that can be independently maintained and replaced. This segmentation allows individual cells to be serviced without shutting down the entire system, resolving the contradiction between system simplicity and ease of repair.
Solution Approach 2:
The modular fuel cell design creates universal, interchangeable units that can serve multiple functions and be easily replaced. This standardization maintains operational simplicity while dramatically improving maintenance capabilities.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system improves power efficiency by reducing energy per wafer processed, minimizes waste by reusing hydrogen gas, and maintains high source power and mirror reflectivity over the lifetime of the scanner, aligning with environmental and corporate governance goals.
Implementation Method 1
a fuel cell that, in operation: receives the hydrogen gas from the pump; generates electric power by the hydrogen gas
Data Source
AI summary
A method includes: forming a mask layer on a semiconductor wafer; generating light by a tin droplet by a lithography exposure system; exposing the mask layer by the light; cleaning tin debris accumulated in the lithography exposure system by hydrogen gas; pumping the hydrogen gas from the lithography exposure system to a fuel cell; and generating electric power by the fuel cell.