EUV Droplet Generator Fuel Impurity Removal
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Solution Overview
Problem
Impurities in the liquid fuel supplied to a droplet generator in EUV photolithography systems can destabilize the generation of droplets, leading to degraded pattern feature quality.
Innovation Solution
The method involves concentrating impurities near the interface between the liquid fuel and a gaseous headspace, and then removing them using a suction conduit, ensuring that the inlet of the suction conduit is positioned optimally to effectively draw out the impurities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If liquid fuel is supplied continuously to the droplet generator, then droplet generation can be maintained, but impurities accumulate in the fuel leading to destabilization of droplet generation
Solution Approach 1:
The system performs preliminary separation of impurities from the liquid fuel before the impurities can accumulate to destabilizing levels. A suction conduit is positioned to draw off impurities as they separate from the fuel, preventing their accumulation and maintaining droplet generation stability over extended periods
Solution Approach 2:
The suction conduit acts as an intermediary component between the liquid fuel supply and the droplet generator. It selectively removes impurities from the fuel stream without disrupting the continuous supply of liquid fuel to the droplet generator, thus mediating between productivity and reliability requirements
2Reliability
If the suction conduit inlet is positioned deeper in the liquid fuel, then more impurities can be removed, but the operational time between maintenance cycles decreases
Solution Approach 1:
The suction conduit inlet is positioned at a specific depth in the liquid fuel where impurities have naturally separated and accumulated. This localized positioning optimizes impurity removal effectiveness while minimizing fuel consumption and maintaining extended operational cycles between maintenance
3Device complexity
If impurities are not removed from the liquid fuel, then the system structure remains simple, but the pattern feature quality degrades
Solution Approach 1:
The system extracts only the essential impurity removal function needed to maintain pattern feature quality, using a simple suction conduit positioned to draw off separated impurities. This minimal extraction approach maintains manufacturing precision without adding complex purification systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the stability of droplet generation, improves the quality of pattern features, and extends the operational time between maintenance cycles of the droplet generator.
Implementation Method 1
removing them using a suction conduit
Implementation Method 2
extreme ultraviolet light is typically produced by irradiating droplets of selected materials from a droplet generator with a laser beam
Implementation Method 3
The energy from the laser causes the droplets to enter a plasma state. In the plasma state, the droplets emit extreme ultraviolet light
Data Source
AI summary
Impurities in a liquefied solid fuel utilized in a droplet generator of an extreme ultraviolet photolithography system are removed from vessels containing the liquefied solid fuel. Removal of the impurities increases the stability and predictability of droplet formation which positively impacts wafer yield and droplet generator lifetime.