EUV Light Generation Gas Flow Control
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Solution Overview
Problem
EUV light generation devices face challenges in accurately controlling the output timing of pulse laser light due to thermal lens formation in the optical path pipe, which affects the detection accuracy of droplet timing and leads to incorrect trigger signals for the laser device.
Innovation Solution
Incorporating a gas supply unit that regulates gas flow within the optical path pipe to maintain uniform temperature distribution, preventing refractive index variations and thus minimizing thermal lens formation, ensuring precise droplet detection and accurate timing control of the pulse laser light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If gas flow is not regulated in the optical path pipe, then the device structure is simpler, but thermal lens formation occurs causing incorrect laser trigger timing
Solution Approach 1:
The patent applies pneumatic principles by introducing a gas supply unit that regulates gas flow through the optical path pipe. This gas flow control system prevents thermal lens formation by maintaining proper cooling and pressure conditions, thereby ensuring accurate droplet detection and correct laser trigger timing without overcomplicating the overall device structure.
Solution Approach 2:
The patent changes physical parameters within the optical path pipe by controlling gas pressure and flow rate. These parameter adjustments prevent thermal accumulation that would cause lens formation, maintaining measurement precision while keeping the device structure relatively simple through parameter optimization rather than structural complexity.
2Reliability
If thermal lens formation is not prevented, then the device operation is simpler, but the output timing of pulse laser light becomes incorrect
Solution Approach 1:
The gas supply unit utilizes pneumatic control to regulate flow through the optical path pipe, preventing thermal lens formation that would compromise laser trigger accuracy. This approach ensures reliable operation through gas flow management rather than complex active temperature control systems.
Solution Approach 2:
The optical path pipe design incorporates self-cooling through regulated gas flow, where the system maintains its own thermal conditions passively. This self-service approach prevents thermal lens formation and ensures accurate laser triggering without requiring external active temperature control mechanisms.
3Measurement precision
If gas flow is regulated to prevent thermal lens, then droplet detection accuracy improves, but energy consumption increases
Solution Approach 1:
The gas supply unit implements partial action by providing just enough gas flow to prevent thermal lens formation without excessive flow that would waste energy. This optimized gas flow rate maintains droplet detection accuracy while minimizing energy consumption associated with gas circulation.
Solution Approach 2:
The system optimizes gas flow parameters (pressure, flow rate) to achieve the minimum necessary flow for preventing thermal lens formation. By carefully adjusting these parameters, the patent maintains high timing detection accuracy while minimizing the energy required to drive the gas flow through the optical path pipe.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the detection accuracy of droplet timing and ensures the correct output timing of the pulse laser light, improving the overall efficiency and reliability of the EUV light generation process by suppressing thermal lens formation and maintaining uniform temperature distribution in the optical path pipe.
Implementation Method 1
a gas supply unit configured to supply gas into the optical path pipe
Implementation Method 2
pulse laser light introduced into a chamber is irradiated to a droplet to thereby generate plasma
Implementation Method 3
the droplet is irradiated with the pulse laser light to thereby generate plasma, whereby extreme ultraviolet light is generated
Data Source
AI summary
Output timing of laser light is controlled with high accuracy. An extreme ultraviolet light generation device may include a chamber in which plasma is generated to generate extreme ultraviolet light, a window provided in the chamber, an optical path pipe connected to the chamber, a light source disposed in the optical path pipe and configured to output light into the chamber via the window, a gas supply unit configured to supply gas into the optical path pipe, and an exhaust port configured to discharge the gas in the optical path pipe to an outside of the optical path pipe.