EUV Light Generation Position Control via Feedforward Timing
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Solution Overview
Problem
Existing EUV light generating apparatuses face challenges in maintaining performance and efficiency when moving the generation position of extreme ultraviolet light, leading to potential operation stops due to performance deterioration and reduced service life from debris contamination.
Innovation Solution
The apparatus includes a control unit that controls the stage, manipulator, and radiation timing using feedback methods and feedforward processes to maintain the relative positional relation between the target and laser light, employing EUV light sensors to adjust the centroid position and delay time, ensuring accurate and efficient movement of the EUV light generation position.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If the generation position of EUV light is moved in existing apparatuses, then the position can be changed, but performance deteriorates and operation stops occur
Solution Approach 1:
The control unit performs feedforward control by calculating and setting the radiation timing of laser light in advance based on the movement amount of the generation position. This preliminary action ensures that the laser light irradiates the target at the correct position even during movement, preventing performance deterioration and operation stops.
Solution Approach 2:
The apparatus uses feedback control where the control unit monitors the actual generation position and adjusts the radiation timing accordingly. The feedback mechanism ensures that the relative positional relation between the target and laser light is maintained, preventing performance deterioration when the generation position is moved.
2Adaptability or versatility
If the generation position of EUV light is moved, then position flexibility is achieved, but debris contamination increases and service life reduces
Solution Approach 1:
The control unit calculates the optimal radiation timing in advance based on the target's movement and the desired generation position. This preliminary action ensures that laser light only irradiates the target when it is at the correct position, minimizing unnecessary irradiation and reducing debris generation that would contaminate the chamber and reduce service life.
Solution Approach 2:
The apparatus dynamically changes the radiation timing parameter of the laser light based on the movement amount of the generation position. By adjusting this parameter in real-time, the system maintains precise control over where and when irradiation occurs, reducing debris contamination while preserving position flexibility.
3Ease of operation
If the radiation timing is not precisely controlled during movement, then the system is simpler to operate, but the relative positional relation between target and laser light deteriorates
Solution Approach 1:
The control unit implements feedback control that automatically adjusts the radiation timing based on the actual position of the target and the desired generation position. This feedback mechanism maintains the relative positional relation between the target and laser light without requiring complex manual adjustments, thus preserving both precision and ease of operation.
Solution Approach 2:
The apparatus replaces complex mechanical positioning systems with a control-based approach. Instead of mechanically adjusting the laser or target positions, the system uses feedforward and feedback control of the radiation timing to maintain the relative positional relation, simplifying the mechanical structure while preserving precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables the EUV light generating apparatus to move the generation position quickly while maintaining performance, reducing operation stops and extending service life by minimizing debris generation and optimizing EUV light output.
Implementation Method 1
a generation position of extreme ultraviolet light is moved based on an instruction from an external device... the target fed therein is irradiated with laser light, whereby the extreme ultraviolet light is generated from the target
Data Source
AI summary
An extreme ultraviolet light generating apparatus moves a generation position of extreme ultraviolet light based on an instruction from an external device and includes a chamber in which a target fed therein is irradiated with laser light so that the extreme ultraviolet light is generated from the target; a target feeder configured to output and feed the target into the chamber; a condensing mirror configured to condense the laser light on the target fed into the chamber; a stage configured to regulate a position of the target feeder; a manipulator configured to regulate a position of the condensing mirror; and a control unit configured to be able to control at least one of the stage, the manipulator, and a radiation timing of the laser light to the target, in a feedforward method, when the generation position is moved during generation of the extreme ultraviolet light.