EUV Lithography GIC Mirror Shell Evaporative Cooling
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Solution Overview
Problem
Current thermal management systems for grazing-incidence collectors (GICs) in extreme ultraviolet (EUV) lithography are inadequate for commercial use, as they fail to efficiently manage high thermal loads without causing optical distortion, especially under increasing EUV power demands.
Innovation Solution
The implementation of an evaporative thermal management system that uses a heat pipe configuration on the outer surface of GIC mirror shells, where broadband radiation initiates evaporation of a coolant fluid, which is then condensed and reused, providing uniform cooling without complex plumbing and minimizing optical distortion.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If conventional coolant plumbing is used to cool GIC mirror shells, then thermal management is achieved, but device complexity increases and optical pathway is obscured
Solution Approach 1:
The patent removes the complex coolant plumbing system from the GIC mirror shell and extracts only the essential cooling function. This is achieved by applying a heat pipe coating directly to the outer surface of the mirror shell, eliminating the need for internal coolant channels and complex piping while maintaining effective thermal management.
Solution Approach 2:
The patent introduces a heat pipe coating as an intermediary substance between the GIC mirror shell and the cooling mechanism. This heat pipe coating acts as a thermal mediator that efficiently transfers heat from the mirror shell surface to the coolant, providing effective cooling without requiring complex internal plumbing structures.
2Temperature
If conventional coolant plumbing is installed on GIC mirror shells, then cooling is provided, but the optical pathway becomes obscured
Solution Approach 1:
The patent removes the obstructive coolant plumbing components from the optical pathway area. By applying heat pipe coating directly to the mirror shell outer surface, the solution eliminates the need for protruding coolant channels and piping that would otherwise block or narrow the optical pathway.
Solution Approach 2:
The patent transitions the cooling mechanism from a three-dimensional internal plumbing structure to a two-dimensional surface coating. The heat pipe coating is applied as a thin layer on the outer surface of the mirror shell, maintaining cooling effectiveness while minimizing impact on the optical pathway clearance.
3Power
If high power loading is applied to GIC sources, then EUV radiation output increases, but thermal load on mirror shells increases causing distortion
Solution Approach 1:
The patent converts the harmful thermal load into a beneficial cooling effect by using the heat pipe coating to efficiently capture and remove excess heat from the mirror shell. The heat pipe coating transforms the thermal challenge posed by high power loading into an opportunity for enhanced heat management, maintaining optical surface uniformity even under high EUV radiation power conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for effective cooling under high power loading conditions, maintaining a uniform temperature distribution and reducing thermal distortion, while being self-regulating and adding minimal width to the GIC mirror shell, thus enabling a low-profile design with minimal optical pathway obscuration.
Implementation Method 1
The applied heat causes a fluid coolant carried by wicking layers adjacent the heated surfaces to evaporate
Implementation Method 2
forming a GIC mirror cooling assembly that defines a heat pipe on the outer surface of a GIC mirror shell
Implementation Method 3
The vapor is removed from the GIC mirror outer surface to a condenser system that condenses the vapor
Implementation Method 4
a fluid coolant carried by wicking layers adjacent the heated surfaces
Data Source
AI summary
Evaporate thermal management systems for and methods of grazing incidence collectors (GICs) for extreme ultraviolet (EUV) lithography include a GIC shell interfaced with a jacket to form a structure having a leading end and that defines a chamber. The chamber operably supports at least one wicking layer. A conduit connects the wicking layer to a condenser system that support cooling fluid in a reservoir. When heat is applied to the leading end, the cooling fluid is drawn into the chamber from the condenser unit via capillary action in the wicking layer and an optional gravity assist, while vapor is drawn in the opposite direction from the chamber to the condenser unit. Heat is removed from the condensed vapor at the condenser unit, thereby cooling the GIC mirror shell.