EUV Lithography Debris Heater Element Design
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Solution Overview
Problem
The existing heating systems for receiving structures in EUV radiation source apparatuses are complex and inefficient due to the need for precise temperature control across numerous local structural elements, which complicates material selection and reliability, especially in vacuum environments.
Innovation Solution
A heating arrangement with an adjustable length heater element is introduced, allowing for uniform heating of receiving surfaces in EUV radiation source apparatuses, where the heater element is inserted into openings within the receiving structure, ensuring that the receiving surface is heated to a temperature sufficient to liquefy debris, thereby improving heat transfer and reducing material constraints.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a receiving structure with numerous local structural elements (fins, vanes) is used to intercept fuel debris, then the intercepting surface area is maximized, but the heating system becomes very complex requiring many individual heating elements and thermal connections
Solution Approach 1:
The patent merges multiple individual heating elements into a single integrated heating structure that can heat multiple receiving surfaces simultaneously. This single heating element design eliminates the need for numerous separate thermal connections while maintaining the ability to heat all fin or vane structures uniformly, thus reducing system complexity while preserving the large intercepting surface area.
Solution Approach 2:
The heating element is designed with multi-functionality to serve multiple receiving surfaces, fins, or vanes simultaneously through a single thermal source. This universal heating approach allows one heating element to perform the function of what would otherwise require many individual heating elements, simplifying the overall heating system while maintaining comprehensive coverage of the intercepting structure.
2Temperature
If resistive heating with thermally conductive connections is used for each heating element, then heating can be provided to local structural elements, but material selection is limited and the system becomes less reliable
Solution Approach 1:
The patent combines multiple heating functions into a single heating element, thereby reducing the number of thermal connections required. This merger eliminates numerous potential failure points in the system, as each thermal connection represents a potential reliability vulnerability. The single integrated heating approach maintains effective heating capability while significantly improving system reliability through reduced connection points.
3Ease of operation
If many local structural elements are heated individually, then each element can be controlled, but the heating system requires many materials that must be EUV- and vacuum-compatible, limiting material choice
Solution Approach 1:
The patent merges the heating control function into a single integrated element rather than requiring individual control of multiple separate heating elements. This consolidation reduces the number of materials required for thermal connections and heating components, thereby expanding material selection flexibility. The single heating element can be made from materials with optimal EUV and vacuum compatibility without requiring multiple different material types across numerous components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the efficiency and reliability of the heating process, allowing for better control over the temperature of the receiving structure, reducing the risk of contamination and improving the overall performance of the EUV radiation source apparatus.
Implementation Method 1
a heating arrangement for heating one or more receiving surfaces of said receiving structure to a temperature sufficient to liquefy said fuel debris... said arrangement comprising a heater element for heating of said receiving surface
Implementation Method 2
a laser for exciting a fuel to provide the plasma... by directing a laser beam at a fuel, such as particles of a suitable material (e.g. tin)
Implementation Method 3
The plasma may be created, for example, by directing a laser beam at a fuel... The resulting plasma emits output radiation, e.g., EUV radiation
Implementation Method 4
liquefy said fuel debris such that it can be made to flow along the surface to another part of the apparatus
Data Source
AI summary
A radiation source generates extreme ultraviolet radiation. The radiation source comprises a plasma formation site located at a position in which a fuel will be contacted by a beam of radiation to form a plasma. A receiving structure is provided to trap debris particles on its surface that are generated with the formation of the plasma. The receiving structure has a rod-shaped heater element for heating the receiving surface, the device preventing large droplets of fuel from forming on the receiving surface. Instead, the trapped fuel is melted off the receiving surface.