EUV Light Generation Device Image Position Adjustment
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Solution Overview
Problem
In EUV light generation systems, maintaining the focus of the image capturing unit is challenging due to variations in the image capturing position caused by refractive index changes of optical elements, leading to unstable EUV light generation and reduced measurement accuracy.
Innovation Solution
The image capturing position of the image capturing unit is adjusted based on image data captured at non-orthogonal and non-parallel angles to the target trajectory, using a movement amount determination unit that calculates the necessary movement to align the image capturing unit with the plasma generation region, thereby stabilizing EUV light generation and improving image sharpness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the image capturing unit uses fixed optical elements, then the device structure is simple, but the image capturing position varies due to refractive index changes, reducing measurement precision
Solution Approach 1:
The patent implements a movable image capturing unit that can dynamically adjust its position along the optical axis. The driving mechanism allows the image capturing unit to move from an initial position to a determined optimal position, enabling real-time compensation for refractive index changes and maintaining measurement precision without requiring complex fixed optical structures
Solution Approach 2:
The system uses image data processing to determine the optimal image capturing position based on the relationship between the plasma generation region and the image capturing unit. This feedback mechanism allows the system to automatically adjust the image capturing unit's position to maintain focus and measurement accuracy despite environmental variations
2Manufacturing precision
If the image capturing position is not adjusted, then the device operation is simple, but the image sharpness deteriorates, reducing manufacturing precision
Solution Approach 1:
The system performs preliminary determination of the optimal image capturing position using image data before actual EUV light generation and measurement. By pre-calculating the required position adjustment based on the plasma generation region's characteristics, the system ensures image sharpness is maintained without requiring complex real-time adjustments during operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures sharp image capture of the target and stabilizes EUV light generation by accurately adjusting the image capturing position, enhancing measurement accuracy and maintaining focus despite variations in optical element refractive indices.
Implementation Method 1
a laser device that emits laser light toward the plasma generation region
Implementation Method 2
plasma generated when a target material is irradiated with pulse laser light
Implementation Method 3
the image capturing unit may capture an image of a region including the plasma generation region
Data Source
AI summary
An extreme ultraviolet light generation device includes: a target supply unit outputting a plurality of targets along a trajectory toward a plasma generation region; a laser device emitting laser light toward the plasma generation region; an image capturing unit having an image capturing direction non-orthogonal and non-parallel to the trajectory, capturing an image of a region including the plasma generation region, and outputting image data; an illumination unit outputting illumination light to the region including the plasma generation region; an image capturing position change unit changing an image capturing position of the image capturing unit along the image capturing direction; a movement amount determination unit determining an movement amount of the image capturing position based on the image data; and a control unit controlling the image capturing position change unit based on the movement amount determined by the movement amount determination unit.