EUV Light Generation System Interlock Mode Switching
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current extreme ultraviolet light generation systems face limitations in operational flexibility and maintenance capabilities, as they cannot perform door opening or optical path tube dismantling operations while the laser units are driven, restricting the types of work that can be done and potentially decreasing system availability.
Innovation Solution
The system incorporates light dimming and shielding units that can be positioned to adjust the laser beam power and blockage, and a control unit that switches between normal, light dimming, and light shielding modes, allowing for various work environments and enabling maintenance operations by deactivating or activating monitoring of interlock switches accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If door opening or optical path tube dismantling operations are performed while laser units are driven, then operational flexibility and maintenance capabilities are improved, but system safety and reliability deteriorate due to potential hazards from high-power laser beams
Solution Approach 1:
The system dynamically adjusts the laser beam power through light dimming units and switches between different operational modes (normal mode, light dimming mode, light shielding mode) based on operational requirements. This allows the system to transition from a static high-power state to flexible power levels, enabling maintenance operations when needed while maintaining safety
Solution Approach 2:
The patent changes the power parameter of the laser beam by introducing light dimming units that can reduce beam intensity and light shielding units that can block the beam entirely. This parameter change allows the system to operate safely during maintenance while maintaining full power during normal operation, resolving the contradiction between flexibility and safety
2Reliability
If monitoring of interlock switches is continuously activated, then system safety is improved, but operational flexibility deteriorates because door opening and maintenance operations cannot be performed
Solution Approach 1:
The control unit dynamically switches the monitoring state of interlock switches based on the operational mode. In normal mode, monitoring is activated to ensure safety. In light dimming mode and light shielding mode, monitoring is deactivated to allow door opening and maintenance operations. This dynamic switching resolves the contradiction between continuous safety monitoring and operational flexibility
Solution Approach 2:
The system periodically transitions between different monitoring states corresponding to different operational modes. The control unit activates monitoring during normal operation and deactivates it during maintenance periods, creating a periodic pattern that balances safety requirements with maintenance needs
3Adaptability or versatility
If light dimming and shielding units are added to enable flexible operations, then operational flexibility and maintenance capabilities are improved, but device complexity increases
Solution Approach 1:
The light dimming units and light shielding units serve multiple functions: they control laser beam power during normal operation, enable safe maintenance operations, and work in conjunction with the control unit to manage interlock switch monitoring. This multi-functionality justifies the added complexity by providing comprehensive operational flexibility and safety management across different operational modes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the system's ability to perform diverse work tasks, including maintenance, by allowing door opening and optical path adjustments, thereby improving operational flexibility and availability.
Implementation Method 1
extreme ultraviolet light is generated from plasma of a target substance irradiated with the laser beam
Implementation Method 2
plasma generating region in which extreme ultraviolet light is generated from plasma of a target substance irradiated with the laser beam
Data Source
AI summary
An extreme ultraviolet light generation system includes: a first area including an optical path adjustment unit; a second area including a chamber having inside a plasma generating region; a first interlock switch disposed in the first area; a second interlock switch disposed in the second area; and a control unit capable of performing switching among a first setting state in which monitoring of a sensing signal output from the first interlock switch and a sensing signal output from the second interlock switch is activated, a second setting state in which monitoring of a sensing signal output from the first interlock switch and a sensing signal output from the second interlock switch is deactivated, and a third setting state in which monitoring of a sensing signal output from the first interlock switch is activated and monitoring of a sensing signal output from the second interlock switch is deactivated.