EUV Laser Beam Path Alignment via Automated Feedback Control
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Solution Overview
Problem
In EUV light generation systems for semiconductor production, the lengthy optical path in laser apparatuses requiring serial amplifier connections leads to labor-intensive and cumbersome re-alignment processes during maintenance, such as replacing optical units, which hampers efficiency and productivity.
Innovation Solution
A laser apparatus with a master oscillator, optical modules that include beam adjusting units, upstream and downstream detection units, and a controller to optimize the beam path and wavefront of the laser beam, allowing for precise adjustments and alignment without extensive manual labor, using a system that includes a guide laser device to facilitate automatic alignment of beam paths.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If serial amplifier connections are used to achieve high output laser beam, then the optical path length increases, but the re-alignment time and labor increase significantly
Solution Approach 1:
The system employs detection units that monitor beam path deviations and provide feedback signals to actuators, which automatically adjust optical elements to correct alignment. This closed-loop feedback mechanism eliminates the need for manual re-alignment during maintenance, resolving the contradiction between high power output requiring long optical paths and the time-consuming re-alignment process.
Solution Approach 2:
The alignment system performs self-correction through automated detection and adjustment mechanisms. The detection units continuously monitor beam position and the actuators automatically compensate for misalignments, enabling the system to maintain optimal alignment without external intervention during maintenance operations.
2Ease of repair
If manual re-alignment process is used during maintenance, then the optical path can be re-adjusted, but the process becomes labor-intensive and cumbersome
Solution Approach 1:
The patent replaces manual mechanical adjustment operations with an automated optical-electrical system. Detection units use optical sensors to monitor beam position, and actuators use electromagnetic mechanisms to adjust optical elements, substituting the manual mechanical re-alignment process with an automated system that is both easier to operate and less labor-intensive.
Solution Approach 2:
The system introduces detection units and actuators as intermediary components between the optical path and the control system. These intermediaries automatically perform the alignment function, eliminating the need for direct manual manipulation of optical elements and simplifying the maintenance operation.
3Productivity
If automatic alignment system is implemented, then re-alignment efficiency improves, but the device complexity increases
Solution Approach 1:
The alignment system is divided into independent modular units: detection units positioned at specific locations along the optical path, actuators associated with individual optical elements, and control modules that process information from detectors and control actuators. This segmentation allows the system to achieve high re-alignment efficiency while managing complexity through modularity, where each segment can be independently optimized and maintained.
Data Source
AI summary
A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.