EUV Laser Beam Delivery with Refraction Plate Position Adjustment

The patent segments the beam adjustment function into two independent components: position adjustment using a refraction plate and pointing adjustment using a mirror. This segmentation eliminates cross-talk between the two adjustment functions, as each component operates independently without interfering with the other, thereby resolving the contradiction between alignment precision and transmission stability.

The refraction plate serves as an intermediary element that performs position adjustment without affecting the beam's pointing direction. By introducing this intermediate component with specific refractive properties, the system achieves precise position control while maintaining stable pointing, thus resolving the cross-talk issue between position and pointing adjustments.

The adjustment system is segmented into two independent functions: position adjustment via refraction plate and pointing adjustment via mirror. This allows position control to be achieved without affecting pointing angle, as each segment operates independently. The refraction plate modifies beam position through lateral displacement while the mirror separately controls pointing angle, eliminating cross-talk and improving both ease of operation and precision.

The patent replaces the mechanical rotation of a mirror (used for position adjustment in conventional systems) with an optical approach using a refraction plate. This substitution eliminates the mechanical coupling between position and pointing adjustments, allowing position control through optical path modification rather than mechanical rotation, thereby preventing inadvertent pointing angle changes.

The system segments the adjustment functionality into two independent modules: position adjustment using a refraction plate and pointing adjustment using a mirror. This segmentation ensures that each adjustment function operates independently without cross-talk, while maintaining full adaptability for both position and pointing control. The modular design allows versatile adjustment capabilities while ensuring reliability through functional independence.

The refraction plate acts as an intermediary that handles position adjustment without interfering with pointing adjustment. By introducing this intermediate optical element with specific refractive properties, the system achieves independent control of position and pointing, eliminating cross-talk while maintaining full adjustment functionality for both parameters.