EUV Light Generation Laser Timing Control
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Solution Overview
Problem
In extreme ultraviolet light generation systems, the instability of target output from the target supply device leads to fluctuations in the time interval of the pulse laser beam, causing energy drops or increases, which can result in incorrect plasma formation and potential damage to the laser apparatus.
Innovation Solution
An EUV light generation apparatus that adjusts the light emission trigger to ensure the pulse laser beam is emitted within a predetermined range by using a controller to synchronize the laser emission with target detection, employing circuits and timers to manage the timing of the light emission trigger signals and suppress unwanted pulses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the target supply device supplies targets consecutively without precise timing control, then the productivity of EUV light generation is maintained, but the pulse laser beam time interval fluctuates causing energy instability and potential damage
Solution Approach 1:
The system uses a detection unit to detect the output timing of targets from the target supply device, and the controller adjusts the light emission trigger timing based on this detection signal. This feedback mechanism ensures that the pulse laser beam is emitted at the correct time interval regardless of fluctuations in target supply timing, thereby stabilizing pulse laser energy without requiring complex mechanical timing mechanisms
Solution Approach 2:
The system allows the target supply device to operate autonomously without precise external timing control. The detection unit automatically detects target output timing, and the controller automatically adjusts the light emission trigger accordingly. This self-service approach simplifies the overall system by eliminating the need for complex synchronized timing mechanisms while maintaining reliability
2Reliability
If the pulse laser beam time interval falls outside the predetermined range, then the device complexity remains low, but incorrect plasma formation occurs and the laser apparatus may be damaged
Solution Approach 1:
The controller generates the light emission trigger based on detection of the target output timing, ensuring that the pulse laser beam is emitted at the correct time interval before plasma formation occurs. This preliminary timing adjustment prevents incorrect plasma formation and protects the laser apparatus from damage by ensuring the pulse laser beam always falls within the predetermined time interval range
Solution Approach 2:
The detection unit provides real-time information about target output timing to the controller, which adjusts the light emission trigger timing accordingly. This feedback ensures that even if target supply timing fluctuates, the pulse laser beam time interval remains within the safe predetermined range, preventing both incorrect plasma formation and laser apparatus damage
3Reliability
If the system uses automatic timing adjustment to stabilize pulse laser energy, then the reliability improves, but the device complexity increases due to additional control circuits and detection units
Solution Approach 1:
The system employs a detection unit to monitor target output timing and feeds this information back to the controller, which adjusts the light emission trigger timing accordingly. This feedback mechanism provides automatic timing adjustment to stabilize EUV light generation, achieving high reliability while keeping the control structure relatively simple by using straightforward detection and timing adjustment logic
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the pulse laser energy and waveform, preventing incorrect plasma formation and protecting the laser apparatus from damage, while maintaining the desired EUV light generation rate.
Implementation Method 1
a pulse laser beam from a laser apparatus
Implementation Method 2
irradiating a target with a pulse laser beam and producing plasma
Data Source
AI summary
An extreme ultraviolet light generation apparatus may include a chamber containing a plasma generation region irradiated by a pulse laser beam from a laser apparatus, a target supply device configured to supply a plurality of targets consecutively to the plasma generation region in the chamber, a target detection unit configured to detect a target outputted from the target supply device, and a laser controller configured to control the laser apparatus; the laser controller generating a light emission trigger instructing a laser device included in the laser apparatus to emit a pulse laser beam, and outputting the generated light emission trigger to the laser apparatus, in accordance with a detection signal from the target detection unit; and the laser controller adjusting generation of the light emission trigger outputted consecutively to the laser apparatus so that a time interval of the light emission trigger is within a predetermined range.