EUV Target Nozzle Piezo Switching for Continuous Operation
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Solution Overview
Problem
Existing EUV light generation systems face downtime and high replacement costs due to abnormality in piezoelectric units, which require chamber opening and reactivation, and limited spare units due to large volume occupation.
Innovation Solution
A piezoelectric unit with multiple piezoelectric elements arranged in the X direction, connected through a switching circuit, allows for switching between elements to maintain normal operation without reactivation, reducing downtime and costs.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single piezoelectric element is used in the nozzle, then the device structure is simple, but the system experiences downtime and requires full replacement when abnormality occurs
Solution Approach 1:
The piezoelectric unit is segmented into multiple independent piezoelectric elements (first, second, and third piezoelectric elements) that can operate independently. When one element becomes abnormal, the others can continue to drive the nozzle, eliminating the need for complete replacement and reducing downtime.
Solution Approach 2:
The system changes the operational parameter by switching between different piezoelectric elements based on their operational status. The control unit monitors and selects functional elements to maintain continuous nozzle vibration, transforming a single-point-of-failure system into a redundant multi-element system.
2Reliability
If multiple piezoelectric elements are added to ensure continuity, then system reliability improves, but the volume occupied by spare units increases
Solution Approach 1:
Multiple piezoelectric elements are merged into a single integrated piezoelectric unit that mounts to one side of the nozzle. This consolidation approach provides redundancy while minimizing the space required compared to having separate spare units stored elsewhere in the system.
Solution Approach 2:
The system dynamically activates only the necessary piezoelectric elements based on real-time operational needs and monitored performance. This allows the system to maintain reliability through redundancy while occupying minimal volume by keeping all elements integrated and accessible within the compact piezoelectric unit.
3Ease of repair
If the chamber is opened to replace piezoelectric units, then replacement can be performed, but the system experiences downtime and requires reactivation
Solution Approach 1:
The useful action of generating EUV light continues uninterrupted because multiple piezoelectric elements ensure that at least one functional element is always available to drive the nozzle. When an element fails, the system switches to another element without stopping the EUV generation process.
Solution Approach 2:
The system performs self-diagnosis and self-switching between piezoelectric elements. The control unit monitors the operational status of each element and automatically switches to a functional element when an abnormality is detected, eliminating the need for manual intervention and chamber opening during operation.
4Reliability
If full piezoelectric unit replacement is required, then abnormal components are removed, but replacement costs and complexity increase
Solution Approach 1:
Only the abnormal piezoelectric element is extracted and replaced, not the entire piezoelectric unit. This selective replacement approach reduces both the complexity of the replacement process and the cost of maintenance while maintaining system reliability.
Solution Approach 2:
The piezoelectric unit is segmented into replaceable individual elements that can be independently serviced. This modular segmentation allows technicians to replace only the failed element without disturbing the other functional elements or the nozzle assembly, simplifying the maintenance process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables continuous EUV light generation by switching to functional piezoelectric elements, minimizing downtime and reducing the need for full device replacement, thus optimizing system efficiency and cost-effectiveness.
Implementation Method 1
a first piezoelectric element arranged at a different position in a first direction with respect to the nozzle, and configured to vibrate the nozzle by expanding and contracting in the first direction
Implementation Method 2
a laser device configured to irradiate the target substance discharged from the nozzle with laser light
Implementation Method 3
an EUV light concentrating mirror configured to concentrate the extreme ultraviolet light generated by irradiating the target substance with the laser light
Data Source
AI summary
A target generation device includes nozzle including a nozzle hole through which a liquid target substance for generating extreme ultraviolet light is discharged; a first piezoelectric element arranged at a different position in a first direction with respect to the nozzle, and configured to vibrate the nozzle by expanding and contracting in the first direction; and a second piezoelectric element arranged at a different position in the first direction with respect to the first piezoelectric element, and configured to vibrate the nozzle via the first piezoelectric element by expanding and contracting in the first direction.