EUV Optical Element Holder With Segmented Cooling and Sealing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In EUV light generation systems, high-power laser beams cause thermal stress and potential airtight seal breaches in optical elements, reducing optical performance and compromising system integrity.
Innovation Solution
A holder device with first and second members sandwiching the optical element, using sealing members to create an airtight seal and incorporating cooling mechanisms to manage thermal stress, such as through-hole configurations and gaskets, to maintain optical performance and system integrity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-power laser beams are used to generate EUV light, then EUV light generation efficiency is improved, but thermal stress on optical elements increases causing potential airtight seal breaches
Solution Approach 1:
The holder is divided into multiple members (first holder member, second holder member, third holder member) that can independently function. The first holder member contacts the optical element for cooling, the second provides sealing, and the third structures the chamber connection. This segmentation allows each component to address specific issues (cooling, sealing, structural support) independently, resolving the contradiction between handling high-power lasers and maintaining seal integrity.
Solution Approach 2:
The first holder member acts as an intermediary between the high-power laser beam and the optical element. It provides a thermal management interface that contacts the optical element to conduct heat away, while the second holder member and sealing member create an intermediary sealing layer that protects against airtight seal breaches. These intermediary components buffer the thermal stress effects.
2Productivity
If high-power laser beams are used to generate EUV light, then EUV light generation efficiency is improved, but optical performance deteriorates due to thermal stress
Solution Approach 1:
The cooling mechanism is activated before and during laser beam irradiation to preemptively manage thermal stress. The first holder member is positioned to contact the optical element in advance, establishing a thermal conduction path before significant heating occurs. This preliminary cooling action prevents thermal distortion that would degrade optical performance while allowing high-power laser operation.
3Reliability
If sealing members are added to prevent airtight seal breaches, then system reliability is improved, but device complexity increases
Solution Approach 1:
The holder members are designed to combine multiple functions within a unified structure. The first holder member simultaneously provides structural support, thermal conduction, and positioning functions. The second holder member integrates sealing surfaces and connection interfaces. This merging of functions reduces the need for separate sealing components and simplifies the overall structure while maintaining reliability.
Solution Approach 2:
Each holder member is designed as a multi-functional component. The first holder member serves as both a cooling element and a structural support. The second holder member provides both sealing and connection functions. This multi-functionality reduces the total number of components needed, thereby reducing device complexity while improving reliability through integrated sealing solutions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively cools the optical elements, reducing thermal stress and maintaining the airtight seal, thereby enhancing optical performance and system reliability in EUV light generation systems.
Implementation Method 1
a first sealing member 143 to create a seal between the second holder member 120 and the window 21
Implementation Method 2
a holder having first and second members to sandwich the optical element therebetween
Data Source
AI summary
A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.