EUV Optical Element Rod-like Insert Cooling
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Solution Overview
Problem
Reflecting optical elements in EUV lithography systems face thermal deformation issues due to increasing radiation power, leading to performance limitations, as existing cooling methods can cause unwanted deformations and flow-induced vibrations.
Innovation Solution
An optical element design with a rod-like insert component integrating the distributor and collector, minimizing direct connections on the substrate, using materials with low thermal expansion, and optimizing cooling channel geometry to reduce deformations and vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If cooling channels are formed directly in the substrate, then cooling efficiency is improved, but internal pressure causes unwanted deformations on the reflective surface
Solution Approach 1:
The cooling system is segmented into three distinct components: cooling channels formed in the substrate, an insert component with distributor and collector, and sealing elements. This segmentation allows the cooling function to be separated from the optical substrate, preventing direct pressure transmission to the reflective surface while maintaining effective cooling.
Solution Approach 2:
The insert component acts as an intermediary between the cooling fluid supply and the cooling channels in the substrate. It distributes cooling fluid through multiple feeders to the cooling channels and collects it via offtakes, mediating the pressure and flow to prevent direct impact on the substrate while maintaining cooling efficiency.
2Adaptability or versatility
If multiple direct connections are made on the substrate for cooling fluid supply, then cooling channel connectivity is improved, but the substrate structure becomes more complex and vulnerable
Solution Approach 1:
The distributor and collector functions are merged into a single insert component that is introduced into the substrate. This consolidation reduces the number of separate connections needed on the substrate, simplifying the overall structure while maintaining full connectivity to all cooling channels through integrated feeders and offtakes.
Solution Approach 2:
The insert component is nested within the substrate structure, with the distributor and collector systems housed inside the substrate body. This nesting allows the complex distribution network to be contained within the substrate without requiring external complexity, protecting the connections while maintaining functionality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design effectively reduces surface deformations and flow-induced vibrations, allowing for precise temperature control and improved performance by minimizing thermal expansion and optimizing cooling fluid flow.
Implementation Method 1
a cooling device which is designed for the flowing of a cooling fluid through the plurality of cooling channels
Implementation Method 2
a reflective coating that is applied to a surface of the substrate
Data Source
AI summary
An optical element for reflecting radiation, such as EUV radiation, comprises: a substrate; a reflective coating applied to a surface of the substrate; a plurality of cooling channels, which run in the substrate below the surface on which the reflective coating is applied; a distributor for connecting at least one cooling fluid inlet to the plurality of cooling channels; and a collector for connecting the plurality of cooling channels to at least one cooling fluid outlet. The distributor and/or the collector are integrated into at least one, optionally rod-like insert component which is introduced into at least one to cavity formed in the substrate. An optical arrangement, such as an EUV lithography system, comprises: at least one optical element formed in the manner described further above; and a cooling device which is designed for the flowing of a cooling fluid through the plurality of cooling channels.