EUV Optical Component Vacuum Leakage Detection
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Solution Overview
Problem
Existing EUV radiation generating devices face challenges in protecting the vacuum environment from leakage, particularly due to potential defects in optical components that can allow cooling media to enter the vacuum chamber, leading to contamination and damage.
Innovation Solution
A device and method that utilize a detection system to identify leaks in optical components, blocking the cooling medium supply and flushing the cooling area with an inert gas to prevent contamination, while using a vacuum generating device to remove the flushing medium, ensuring the vacuum environment remains sealed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an optical component seals off the vacuum environment, then the vacuum environment is protected from leakage, but the optical component itself becomes a potential source of leakage due to defects or damage
Solution Approach 1:
The patent segments the optical component into two separate sealed areas: a first sealed area containing the optical component and a second sealed area (vacuum environment). This segmentation allows independent monitoring and protection - if the optical component leaks, only the first sealed area is affected, while the second sealed area remains protected by its own separate sealing mechanism.
Solution Approach 2:
The patent introduces an intermediary detection device that monitors the optical component for leaks. This detection device acts as a mediator between the optical component and the vacuum environment, detecting leaks early and triggering protective actions (such as shutting down cooling media supply) before contamination can reach the vacuum environment.
2Temperature
If cooling media is supplied to cool the optical component, then the optical component temperature is reduced, but cooling media can leak into the vacuum environment through defects in the optical component
Solution Approach 1:
The patent applies preliminary anti-action by implementing a detection and response system that acts before cooling media can contaminate the vacuum environment. The detection device monitors for leaks in real-time, and upon detecting a leak, immediately triggers protective actions (such as shutting off cooling media supply) to prevent the harmful effect of contamination.
Solution Approach 2:
The patent implements a feedback mechanism where the detection device continuously monitors the optical component for leaks and provides real-time information to a control system. This feedback loop allows the system to automatically adjust cooling media supply based on the detected leak conditions, maintaining temperature control while preventing contamination.
3Measurement precision
If a detection device is added to detect leaks, then leak detection capability is improved, but the device complexity increases
Solution Approach 1:
The patent applies self-service by designing a detection system that automatically monitors and responds to leaks without requiring external intervention. The detection device is integrated into the existing system architecture, using the same sealing and cooling infrastructure already in place, thereby minimizing additional complexity while maintaining high detection precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents the ingress of cooling media into the vacuum environment, minimizing contamination and damage by detecting leaks and initiating flushing operations, thus maintaining the integrity of the vacuum environment.
Implementation Method 1
a cooling device for cooling the optical component by supplying a cooling medium to a cooling area
Implementation Method 2
a vacuum generating device for generating a vacuum in a vacuum area which is separate from the vacuum environment and from the cooling area
Data Source
Figure 1
Figure 2a~2b
Figure 3a~3b
AI summary
Methods, devices, and systems for protecting a vacuum environment from leakage are provided. The devices include an optical component for gas-tight closure of the vacuum environment, a retention device configured to retain the optical component and including a cooling region separated from the vacuum environment in a gas-tight manner and configured to receive a cooling medium to cool the optical component, a first part-region of the optical component being arranged in the cooling region, and a reduced-pressure region configured to have a reduced pressure and separated in a gas-tight manner from the vacuum environment and from the cooling region, a second part-region of the optical component being arranged in the reduced-pressure region, and a detector configured to detect a leakage in the optical component when the cooling medium flows from the cooling region into at least one of the reduced-pressure region or the vacuum environment.