EUV Light Generation Optical Unit Height Positioning Mechanism
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Solution Overview
Problem
Existing extreme ultraviolet light generation systems face challenges in accurately positioning and aligning the laser beam introduction optical system due to differences between the guide height and installation height, leading to potential shifts in optical alignment which are critical for maintaining precise EUV light generation.
Innovation Solution
The system employs a height positioning mechanism using ball casters and rails with retraction parts to ensure the optical unit is positioned at the installation height equal to the guide height, reducing impact and alignment shifts during attachment, and incorporates a pressing unit for precise horizontal positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the optical unit is positioned using a guide surface at guide height, then the optical unit can be moved into the housing space, but the optical alignment shifts because guide height differs from installation height
Solution Approach 1:
The guide surface is designed to guide the optical unit at guide height before installation, and the pressing unit is prepared in advance to apply pressing force that raises the optical unit from guide height to installation height. This preliminary guiding action followed by height adjustment eliminates alignment shifts while maintaining ease of operation.
Solution Approach 2:
The pressing unit acts as an intermediary mechanism between the guide surface and the final installation position. It applies pressing force to transition the optical unit from guide height to installation height, ensuring accurate optical alignment without requiring manual adjustment.
2Manufacturing precision
If the optical unit is raised from guide height to installation height during movement, then alignment precision is improved, but impact occurs during the transition
Solution Approach 1:
The pressing unit is designed to apply pressing force gradually and controllably during the height transition. The pressing mechanism includes cushioning elements that absorb impact during the transition from guide height to installation height, preventing damage while achieving precise alignment.
3Reliability
If the optical unit is securely fixed at installation position, then alignment stability is improved, but the device complexity increases
Solution Approach 1:
The pressing unit is designed to automatically apply pressing force when the optical unit reaches the installation position, securing it without requiring additional complex fixing mechanisms. The system uses the movement mechanism's own motion to trigger the pressing action, achieving reliable fixation while minimizing added complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach stabilizes the optical alignment by ensuring the optical unit is accurately positioned at the installation height, minimizing alignment shifts and maintaining the precision required for EUV light generation, with negligible impact and improved reproducibility.
Implementation Method 1
a movement mechanism configured to linearly move the optical unit in the horizontal direction in the housing space while keeping the optical unit at a guide height, and including a guide member provided with a guide surface that guides the optical unit to the installation position while contacting a second part of the optical unit
Implementation Method 2
a height positioning mechanism configured to position, at a predetermined installation position in the housing space, the optical unit to a predetermined installation height while contacting a first part of the optical unit
Implementation Method 3
extreme ultraviolet light is generated by a target substance being irradiated with a laser beam to generate plasma from the target substance
Data Source
AI summary
An extreme ultraviolet light generation apparatus includes: a chamber; an optical unit; a chamber reference member including a housing space in which the optical unit is housed; a height positioning mechanism configured to position, at a predetermined installation position in the housing space, the optical unit to a predetermined installation height while contacting a first part of the optical unit; and a movement mechanism configured to linearly move the optical unit in the horizontal direction in the housing space while keeping the optical unit at a guide height, and including a guide member and a retraction part, wherein the guide height of the optical unit while being guided to move toward the installation position by the guide surface is substantially equal to the installation height.