EUV Pellicle Storage in Inert Containers
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Solution Overview
Problem
Ultra-thin, ultra-low density carbon nanotube (CNT) pellicle films used in EUV lithography are prone to damage and property alterations due to sensitivity to volatile organic compounds and environmental pollutants, leading to changes in light transmittance and scattering, which affect their performance during storage and transportation.
Innovation Solution
A nanostructure film with randomly intersected nanofibers forming an interconnected network structure, coated with metals or metal oxides, is stored in a non-outgassing container material like stainless steel, glass, or glass-ceramic, under vacuum or inert gas conditions to maintain high EUV transmission rates and mechanical strength.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Illumination intensity
If ultra-thin carbon nanotube pellicle films are used to achieve high EUV transmission, then light transmittance is improved, but the films become highly sensitive to volatile organic compounds and environmental pollutants causing property alterations
Solution Approach 1:
The patent applies inert atmosphere by storing and transporting ultra-thin carbon nanotube pellicle films in vacuum or inert gas environments. This prevents the films from exposing to volatile organic compounds and environmental pollutants that would otherwise cause property alterations, while maintaining the high EUV transmission capability of the ultra-thin structure
Solution Approach 2:
The patent uses container materials (stainless steel, glass, or glass-ceramic) as intermediaries between the pellicle films and the external environment. These containers act as barriers that prevent direct contact with harmful volatile organic compounds and pollutants, while allowing the films to maintain their optical properties for EUV transmission
2Strength
If carbon nanotube-based thin films are made thicker to support structural integrity, then mechanical strength is improved, but EUV transmission is compromised
Solution Approach 1:
The patent employs composite material structures combining carbon nanotubes with supporting frameworks (such as metal grids or membranes). This allows the pellicle to achieve both high EUV transmission through the thin carbon nanotube layer and sufficient mechanical strength through the supportive composite structure
Solution Approach 2:
The patent utilizes flexible thin film structures with controlled thickness to balance mechanical strength and EUV transmission. The carbon nanotube films are designed with optimal thickness to maintain structural integrity while allowing maximum light transmission, supported by flexible substrate or framework structures
3Ease of operation
If pellicle films are stored in conventional container materials, then ease of storage is improved, but outgassing from container material degrades pellicle properties over time
Solution Approach 1:
The patent specifies using vacuum or inert gas-filled containers for storage, creating an inert environment that prevents outgassing from degrading the pellicle properties. This maintains property stability while remaining easy to operate through standard storage container designs
Solution Approach 2:
The patent changes the physical and chemical parameters of the storage environment by using vacuum or inert gas conditions instead of ambient air. This prevents outgassing interactions between container materials and pellicle films, maintaining composition stability over time while preserving ease of storage operation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures that the nanostructure films retain their high EUV transmission rates and mechanical properties over time, even after storage for several days or weeks, by minimizing exposure to contaminants and maintaining the integrity of the pellicle films.
Implementation Method 1
a light transmission rate from 50% and above to 95% and above when measured at 550 nm wavelength and an EUV transmission rate from 75% and above to 94% and above, up to 99%
Implementation Method 2
storage container material to store and transport ultra-thin, ultra-low density, nanostructured free-standing pellicle films properly to avoid or reduce undesired effects on the ultra-thin films and/or ultra-thin film devices because of outgassing from container material
Implementation Method 3
Some of the energy is absorbed during this process, and heat may be generated, absorbed, and accumulated as a result
Data Source
AI summary
A method of storing extreme ultraviolet (EUV) pellicles or pellicle film is disclosed. The method includes selecting a material, such as stainless steel or glass material, for the construction of the storage or transportation containers. Vacuum-sealed or inert-gas-filled containers are further preferred. The material maintains one or more properties of extreme ultraviolet (EUV) lithography pellicle, the one or more properties being selected from EUV transmission rate, EUV transmission variation, EUV scattering, EUV pellicle film deflection, EUV pellicle film tensile strength, or a combination thereof.