Single-Material EUV Pellicle Frame With Integrated Spring Mounts

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Solution Overview

Problem

Existing pellicle frames for EUV lithographic apparatuses are complex and costly to manufacture due to separate components made from different materials, requiring assembly in clean environments and facing challenges with particle contamination and mechanical stability under acceleration, especially when attached to reticles.

Innovation Solution

A pellicle frame composed of a single material, such as titanium, with integrated spring portions for connection to a patterning device, allowing for relative movement and thermal expansion, reducing the number of components and simplifying assembly.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If separate components made from different materials are used in the pellicle frame, then the mechanical stability and particle contamination resistance are improved, but the manufacturing complexity and cost increase significantly

Engineering Contradiction:

Improvemechanical stabilityVSAvoidmanufacturing complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple separate components (first portion for pellicle connection and second portions for patterning device connection) into a single integrated pellicle frame made from one piece of substrate. This integration maintains the mechanical stability and particle contamination resistance of separate components while eliminating the complexity of assembling multiple parts made from different materials.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The single substrate performs multiple functions simultaneously: it provides the structural framework for both the first portion (pellicle connection) and the second portions (patterning device connection), replacing what would traditionally require multiple specialized components made from different materials.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Object-affected harmful factors

If separate components are assembled in clean environments, then the particle contamination is reduced, but the manufacturing cost and time increase

Engineering Contradiction:

Improveparticle contaminationVSAvoidmanufacturing efficiency

Core Design Contradiction:

Object-affected harmful factorsVSProductivity

Solution Approach 1:

The pellicle frame is manufactured as a single integrated component before being transported to the clean environment, so that no assembly operations need to be performed within the clean room. This preliminary manufacturing action eliminates the need for maintaining large clean environments during assembly, thereby reducing manufacturing costs and time while still ensuring particle contamination control.

Inventive Principle:

Principle #10Preliminary action

3Adaptability or versatility

If multiple separate parts are connected together, then the functionality is improved, but the assembly difficulty and risk of assembly errors increase

Engineering Contradiction:

Improvefunctional capabilityVSAvoidassembly ease

Core Design Contradiction:

Adaptability or versatilityVSEase of operation

Solution Approach 1:

The patent combines multiple functional portions (first portion for pellicle attachment and multiple second portions for patterning device attachment) into a single integrated substrate, eliminating the need for complex assembly operations between separate parts while maintaining all required functionalities.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

While integrated into a single substrate, the pellicle frame maintains functional segmentation through distinct regions: the first portion for pellicle connection and multiple second portions for patterning device connection. This segmentation provides the necessary functionality without requiring physical separation into multiple assembleable components.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The single-material pellicle frame simplifies manufacturing, reduces costs by 10 times, minimizes particle contamination, and maintains mechanical stability under acceleration, ensuring accurate imaging without assembly errors.

Implementation Method 1

each of the second portions is connected to the first portion by a spring portion formed from the first material

Methodology Applied

Scientific EffectElasticity: Elasticity

Implementation Method 2

allowing for relative movement and thermal expansion

Methodology Applied

Scientific EffectThermal expansion: Thermal Expansion

Data Source

PatentUS12474632B2Pellicle frame for EUV lithography

Publication Date: 2025.11.18 ASML NETHERLANDS BV

AI summary

A pellicle frame includes: a first portion; and a plurality of second portions. The first portion is for connection to a border of a pellicle. The first portion includes a hollow and generally rectangular body. The plurality of second portions are for connection to a patterning device. The first portion and the plurality of second portions are all formed from a first material. Each of the second portions is connected to the first portion by a spring portion formed from the first material. Such a pellicle frame is advantageous since the first portion, the plurality of second portions and the spring portions are all formed from a same material.